1-1 of 1
Keywords: bonding processes
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Eng. Gas Turbines Power. January 2007, 129(1): 49–60.
Published Online: September 28, 2005
... silicon sputter etching bonding processes platinum foams organic compounds Since high power density requirements mandate high mass flow rates through small chamber volumes, the mass flow rate per unit volume cannot be reduced without compromising device power density. Hence, there is a basic...