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Keywords: bonding processes
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Journal Articles
Article Type: Technical Papers
J. Eng. Gas Turbines Power. January 2007, 129(1): 49–60.
Published Online: September 28, 2005
... Paper No. 95-GT-65. 25 08 2005 28 09 2005 gas turbines engines catalysis combustion micromachining silicon sputter etching bonding processes platinum foams organic compounds Advances in silicon microfabrication techniques and microelectromechanical systems (MEMS...
