Novel Sensor Fabrication Using Direct-Write Thermal Spray and Precision Laser Micromachining

[+] Author and Article Information
Q. Chen, T. Tong, J. P. Longtin

Department of Mechanical Engineering, State University of New York at Stony Brook, Stony Brook, NY 11794–2300

S. Tankiewicz, S. Sampath, R. J. Gambino

Department of Materials Science and Engineering, State University of New York at Stony Brook, Stony Brook, NY 11794–2275

J. Manuf. Sci. Eng 126(4), 830-836 (Feb 04, 2005) (7 pages) doi:10.1115/1.1813481 History: Received May 22, 2003; Revised March 29, 2004; Online February 04, 2005
Copyright © 2004 by ASME
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Schematics of (a) experiment setup and (b) ultrafast laser patterning
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(a) SEM image of laser-cut pattern, (b) LCTS microheater with uniform pattern, and (c) LCTS microheater with nonuniform pattern
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Microheater measurement results (a) center temperature versus power for uniform pattern and (b) temperature distribution for nonuniform pattern
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(a) Grid pattern, (b) bare LCTS strain-gauge sample, and (c) embedded LCTS strain-gauge sample
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Schematic of experiment setup for sensitivity measurement
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Results of sensitivity measurement for samples in Group A and B
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Comparison of bare and embedded strain-gauge performances
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Results of (a) TCR and (b) long-term stability tests



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