A Consideration of Surface Roughness Measurement by Optical Method

[+] Author and Article Information
M. Shiraishi

Ibaraki University, Hitachi, Japan

J. Eng. Ind 109(2), 100-105 (May 01, 1987) (6 pages) doi:10.1115/1.3187097 History: Received July 14, 1986; Online July 30, 2009


A modified reflection theory based on Beckmann and Spizzichino is described which evaluates the surface roughness in connection with Rmax roughness value. Computer simulations due to this theory are relatively in good agreement with the experiments. Further, the simulation results suggest that the reflection characteristics can be freely changed to some extent by varying the incidence and acceptance angles of light. Also, the proposed measuring system is easily applicable to the real-time detection of turned surfaces without affecting its working accuracy.

Copyright © 1987 by ASME
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