Process Window Derivation With an Application to Optical Media Manufacturing

[+] Author and Article Information
David Kazmer, Liang Zhu, David Hatch

Department of Mechanical & Industrial Engineering, University of Massachusetts Amherst, Engineering Laboratory Building, Amherst, MA 01003

J. Manuf. Sci. Eng 123(2), 303-311 (Aug 01, 2000) (9 pages) doi:10.1115/1.1363600 History: Received March 01, 2000; Revised August 01, 2000
Copyright © 2001 by ASME
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Grahic Jump Location
Process window representation
Grahic Jump Location
Process model and specification
Grahic Jump Location
Decision space of x2 vs. x4 with other parameters fixed
Grahic Jump Location
Decision space of x2 vs. x4 after linearization
Grahic Jump Location
Performance space of y1 vs. y3
Grahic Jump Location
Process sensitivity and performance space
Grahic Jump Location
DVD process hyper-window
Grahic Jump Location
Feasible, dynamic decision space
Grahic Jump Location
Feasible, dynamic decision space



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