High-Speed Scanning of Piezo-Probes for Nano-fabrication

[+] Author and Article Information
D. Croft, D. McAllister, S. Devasia

Dept. of Mechanical Engineering U. of Utah, SLC, UT 84112

J. Manuf. Sci. Eng 120(3), 617-622 (Aug 01, 1998) (6 pages) doi:10.1115/1.2830166 History: Received February 01, 1997; Revised May 01, 1997; Online January 17, 2008


Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics—this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations.

Copyright © 1998 by The American Society of Mechanical Engineers
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