Noncontact Sphericity Measurement by Means of Phase Shift Interferometry

[+] Author and Article Information
Ming Chang

Mechanical Engineering Department, Chung Yuan Christian University, Chung Li, Taiwan

P. P. Lin

Mechanical Engineering Department, Cleveland State University, Cleveland, Ohio 44115

J. Manuf. Sci. Eng 118(3), 394-399 (Aug 01, 1996) (6 pages) doi:10.1115/1.2831043 History: Received July 01, 1993; Revised March 01, 1995; Online January 17, 2008


This paper presents an accurate optical technique for sphericity measurement of a ball by means of phase shift interferometry. The ball is placed in a fixture on a numerically control rotary stage to achieve a 360 degrees inspection. A CCD camera is used to capture the images of interference fringes, and the generated interferograms are used to calculate the phase values which can then be used to quantify the sphericity error. With the calculated phase values, the eccentricity of the rotary stage’s spindle can be estimated and compensated. The Zernike polynomials is employed in the process of calibration to gracefully remove defocus and tilts. The experimental procedure, the sphericity measurement results and their statistical data analysis are presented.

Copyright © 1996 by The American Society of Mechanical Engineers
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