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Proceedings Papers

A Novel MEMS-Based Technique for In-Situ Characterization of Freestanding Nanometer Scale Thin Films Inside SEM and TEM

M. A. Haque, M. T. A. Saif
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 15-20, November 11–16, 2001
Paper No: IMECE2001/MEMS-23802
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23802
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Topics: Microelectromechanical systems, Nanoscale phenomena, Thin films, Tensile testing, Aluminum, Displacement, Force sensors, Stress, Testing
Proceedings Papers

Metal-Induced Laterally Crystallized Polycrystalline Silicon for Micro-Systems: Mechanical and Etching Characteristics

Mingxiang Wang, Wan Lap Yeung, Yitshak Zohar, Man Wong
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 345-349, November 11–16, 2001
Paper No: IMECE2001/MEMS-23850
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23850
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Topics: Etching, Metals, Microelectromechanical systems, Polysilicon, Electrical properties, Grain boundaries, Pressure, Vapors
Proceedings Papers

Pirani Pressure Sensor With Distributed Temperature Sensing

J. J. van Baar, R. J. Wiegerink, T. S. J. Lammerink, G. J. M. Krijnen, M. Elwenspoek
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 115-122, November 11–16, 2001
Paper No: IMECE2001/MEMS-23817
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23817
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Topics: Microelectromechanical systems, Pressure sensors, Temperature, Microbeams, Pressure, Temperature distribution, Thermal conductivity, Heat losses, Heat sinks, Resistors
Proceedings Papers

Performance Characterization of Micromachined Tunneling Infrared Detectors

Olaleye Ajakaiye, Choongsoo Shin, John Grade, Thomas W. Kenny
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 35-40, November 11–16, 2001
Paper No: IMECE2001/MEMS-23805
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23805
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Topics: Microelectromechanical systems, Micromachining, Performance characterization, Sensors, Tunnel construction, Noise (Sound), Manufacturing, Semiconductor wafers
Proceedings Papers

Selective Chemical Liquid Deposition for Fabrication of Mini-Structures and Microsystems

Jack G. Zhou, Feng Wang
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 325-332, November 11–16, 2001
Paper No: IMECE2001/MEMS-23847
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23847
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Topics: Manufacturing, Microelectromechanical systems
Proceedings Papers

Through-Wafer Electrical Interconnects for MEMS Sensors

Venkataraman Chandrasekaran, Eugene M. Chow, Thomas W. Kenny, Toshikazu Nishida, Mark Sheplak
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 319-324, November 11–16, 2001
Paper No: IMECE2001/MEMS-23846
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23846
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Topics: Microelectromechanical systems, Semiconductor wafers, Sensors, Capacitance, Manufacturing, Noise (Sound), Polysilicon, Silicon, Boron, Heat conduction
Proceedings Papers

Characterization of a Piezoelectric Membrane for MEMS Power

K. Bruce, R. Richards, D. Bahr, C. Richards
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 21-28, November 11–16, 2001
Paper No: IMECE2001/MEMS-23803
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23803
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Topics: Membranes, Microelectromechanical systems, Generators, Thin films, Power systems (Machinery), Carnot cycle, Design, Electrical measurement, Electricity (Physics), Energy / power systems
Proceedings Papers

Friction and Tribological Considerations for Nanometer Range Machining

Som Chattopadhyay
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 411-417, November 11–16, 2001
Paper No: IMECE2001/MEMS-23861
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23861
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Topics: Friction, Machining, Microelectromechanical systems, Tribology, Deformation
Proceedings Papers

On the Driving Mechanism Design for Large Amplitude Electrostatic Actuation

Jerwei Hsieh, Chien-Cheng Chu, Weileun Fang
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 29-34, November 11–16, 2001
Paper No: IMECE2001/MEMS-23804
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23804
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Topics: Actuators, Design, Electrostatic actuators, Microelectromechanical systems, Vibration equipment
Proceedings Papers

Piezoelectric Bimorph Microphone With Serial Electrical Connection

Seung Hwan Yi, Eun Sok Kim
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 391-396, November 11–16, 2001
Paper No: IMECE2001/MEMS-23857
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23857
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Topics: Microelectromechanical systems, Microphones
Proceedings Papers

Resistance of Liquid Metal Droplets Against Actuation on Microstructured Surfaces

Wenjiang Shen, Joonwon Kim, Chang-Jin “CJ” Kim
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 215-220, November 11–16, 2001
Paper No: IMECE2001/MEMS-23831
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23831
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Topics: Drops, Liquid metals, Microelectromechanical systems
Proceedings Papers

Splitting a Liquid Droplet for Electrowetting-Based Microfluidics

Sung Kwon Cho, Hyejin Moon, Jesse Fowler, Chang-Jin “CJ” Kim
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 207-213, November 11–16, 2001
Paper No: IMECE2001/MEMS-23830
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23830
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Topics: Drops, Microelectromechanical systems, Microfluidics
Proceedings Papers

Microscale Liquid Impingement Cooling

Lian Zhang, Evelyn N. Wang, Jon D. Koch, Jonathan T. C. Liu, Jae-Mo Koo, Linan Jiang, Kenneth E. Goodson, Juan G. Santiago, Thomas W. Kenny
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 135-140, November 11–16, 2001
Paper No: IMECE2001/MEMS-23820
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23820
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Topics: Impingement cooling, Microelectromechanical systems, Microscale devices, Jets, Water, Computer cooling, Flow (Dynamics), Heat flux, Heat transfer coefficients, Orifices
Proceedings Papers

Micromechanical Clamps for Optical Fiber Packaging of High Aspect Ratio MEMS Devices

Michael A. Beamesderfer, Ed Litcher, Don L. DeVoe
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 71-75, November 11–16, 2001
Paper No: IMECE2001/MEMS-23810
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23810
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Topics: Microelectromechanical systems, Optical fiber, Packaging, Clamps (Tools), Fibers, Design, Nickel, Silicon, Cantilever beams, Cantilevers
Proceedings Papers

Modeling and Simulating MEMS Devices Using Finite Element Analysis

Ulises Gonzalez
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 9-13, November 11–16, 2001
Paper No: IMECE2001/MEMS-23801
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23801
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Topics: Finite element analysis, Microelectromechanical systems, Modeling, Computer software, Dimensions, Mechanical behavior, Design, Electromagnetic force, Electromagnetism, Electrostatics
Proceedings Papers

Temperature-Dependent Property Effects on Laminar Flow Characteristics in a Rectangular Microchannel

Ho Joon Park, Sang Young Son, Mun Cheol Choi, Geunbae Lim, In-Seob Song, James Jungho Pak
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 443-448, November 11–16, 2001
Paper No: IMECE2001/MEMS-23865
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23865
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Topics: Laminar flow, Microchannels, Microelectromechanical systems, Temperature, Flow (Dynamics), Fluids, Pressure drop, Resistance thermometers, Dimensions, Heat flux
Proceedings Papers

MEMS Metrology Using Resonant Structures

A. Miller Allen, George C. Johnson
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 229-231, November 11–16, 2001
Paper No: IMECE2001/MEMS-23833
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23833
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Topics: Metrology, Microelectromechanical systems, Resonance, Geometry, Materials properties, Micromachining
Proceedings Papers

Operating Frequency of Thin Film NiTi in Fluid Media

Daniel D. Shin, Gregory P. Carman
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 221-227, November 11–16, 2001
Paper No: IMECE2001/MEMS-23832
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23832
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Topics: Fluids, Microelectromechanical systems, Nickel titanium alloys, Thin films
Proceedings Papers

Surface Micromachined Electrothermal V-Beam Micromotors

David S. Schreiber, Wei-Jen Cheng, John M. Maloney, Don L. DeVoe
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 141-147, November 11–16, 2001
Paper No: IMECE2001/MEMS-23821
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23821
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Topics: Microelectromechanical systems, Micromachining, Micromotors, Microactuators, Displacement, Engine design, Engines, Motors, Polysilicon, Reliability
Proceedings Papers

Tunable Phase Grating Using CMOS Processes

Yu-Sheng Yang, Cheng-Hsien Liu, Bruce C. S. Chou
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 77-82, November 11–16, 2001
Paper No: IMECE2001/MEMS-23811
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23811
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Topics: Complementary metal oxide semiconductors, Diffraction gratings, Microelectromechanical systems, Design, Aluminum, Dry etching, Electrodes, Electrostatic actuators, Modeling, Reactive-ion etching