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Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 325-332, November 11–16, 2001
Paper No: IMECE2001/MEMS-23847
Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 411-417, November 11–16, 2001
Paper No: IMECE2001/MEMS-23861
Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 391-396, November 11–16, 2001
Paper No: IMECE2001/MEMS-23857
Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 215-220, November 11–16, 2001
Paper No: IMECE2001/MEMS-23831
Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 207-213, November 11–16, 2001
Paper No: IMECE2001/MEMS-23830
Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 229-231, November 11–16, 2001
Paper No: IMECE2001/MEMS-23833
Proceedings Papers

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 221-227, November 11–16, 2001
Paper No: IMECE2001/MEMS-23832