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Proceedings Papers

Lung-Diaphragm Model of the Respiratory System for Parameter Estimation Studies

Narciso F. Macia, William J. Dorson, Walter T. Higgins, Jr.

Proc. ASME. IMECE97, Advances in Bioengineering, 47-48, November 16–21, 1997

Paper No: IMECE1997-0221

DOI: https://doi.org/10.1115/IMECE1997-0221

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Lung, Parameter estimation, Respiratory system, Dynamics (Mechanics)

Proceedings Papers

Analysis on Multi-Layered, Corrugated Diaphragm With Residual Stress

Hai Yan, Kuok Chun Lou, Byungchai Lee, Eun Sok Kim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 373-378, November 15–20, 1998

Paper No: IMECE1998-1271

DOI: https://doi.org/10.1115/IMECE1998-1271

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Stress, Deflection, Pressure, Residual stresses, Stress concentration, Anisotropy, Design, Finite difference methods

Proceedings Papers

Numerical Simulation and Design of the Four-Terminal Piezoresistive Pressure Transducer

Chahid K. Ghaddar, Mark G. da Silva, John R. Gilbert, Stephen F. Bart

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 329-334, November 15–20, 1998

Paper No: IMECE1998-1263

DOI: https://doi.org/10.1115/IMECE1998-1263

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Topics: Computer simulation, Design, Pressure transducers, Resistors, Diaphragms (Mechanical devices), Diaphragms (Structural), Bridges (Structures), Sensors, Dimensions, Pressure sensors

Proceedings Papers

On the Modeling of the Wheatstone-Bridge Piezoresistive Pressure Sensor: A Finite-Element-Based Approach

Chahid K. Ghaddar, John R. Gilbert

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 195-200, November 14–19, 1999

Paper No: IMECE1999-0267

DOI: https://doi.org/10.1115/IMECE1999-0267

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Topics: Bridges (Structures), Modeling, Pressure sensors, Resistors, Design, Diaphragms (Mechanical devices), Diaphragms (Structural), Diffusion (Physics), Dimensions, Engineering simulation

Proceedings Papers

Development of a Latching Valve for Micro-Chem-Lab™

C. Channy Wong, Douglas R. Adkins, Ronald P. Manginell, Gregory C. Frye-Mason, Peter J. Hesketh, Thomas Stanczyk

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 427-434, November 14–19, 1999

Paper No: IMECE1999-0301

DOI: https://doi.org/10.1115/IMECE1999-0301

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Topics: Chemistry, Valves, Design, Pressure, Diaphragms (Mechanical devices), Diaphragms (Structural), Energy consumption, Flow (Dynamics), Microelectromechanical systems, Actuators

Proceedings Papers

A Novel Fabrication Methodology for Micromachined Sensor-Arrays With Multi-Thickness Configuration

Xinxin Li, Rongming Lin, Minhang Bao

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 269-274, November 14–19, 1999

Paper No: IMECE1999-0279

DOI: https://doi.org/10.1115/IMECE1999-0279

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Topics: Manufacturing, Micromachining, Sensors, Etching, Design, Switches, Anisotropy, Density, Diaphragms (Mechanical devices), Diaphragms (Structural)

Proceedings Papers

A New Transverse Electromagnetic Microactuator Using the Radial Magnetic Field Guided by Symmetric Twin Magnets

Ji-Chul Ryu, Tae Goo Kang, Young-Ho Cho

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 105-109, November 14–19, 1999

Paper No: IMECE1999-0253

DOI: https://doi.org/10.1115/IMECE1999-0253

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Topics: Magnetic fields, Magnets, Microactuators, Diaphragms (Mechanical devices), Diaphragms (Structural), Copper, Q-factor, Resonance, Silicon

Proceedings Papers

Coupled Electrostatics-Structures-Fluidic Simulations of a Bead Mesopump

M. M. Athavale, H. Y. Li, H. Q. Yang, A. J. Przekwas, C. Cabuz, W. Herb

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 459-465, November 14–19, 1999

Paper No: IMECE1999-0306

DOI: https://doi.org/10.1115/IMECE1999-0306

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Topics: Electrostatics, Simulation, Engineering simulation, Pumps, Flow (Dynamics), Computer simulation, Diaphragms (Mechanical devices), Diaphragms (Structural), Electrodes, Film flow

Proceedings Papers

Extensive Experimental Study on Diaphragm-Based Piezoelectric Microphone

Meng-Nian Niu, Hong Zeng, Hai Yan, Eun Sok Kim

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 209-213, November 14–19, 1999

Paper No: IMECE1999-0269

DOI: https://doi.org/10.1115/IMECE1999-0269

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Microphones, Displacement, Stress, Acoustics, Compressive stress, Electrodes, Lasers, Micromachining

Proceedings Papers

The Fabrication and Test of a Phase-Change Micropump

Hyeun Joong Yoon, Woo Young Sim, Sang Sik Yang

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 479-484, November 11–16, 2001

Paper No: IMECE2001/MEMS-23870

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23870

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Topics: Manufacturing, Microelectromechanical systems, Micropumps, Valves, Flow (Dynamics), Actuators, Diaphragms (Mechanical devices), Diaphragms (Structural), Fluids, Aluminum

Proceedings Papers

Vibration-Induced Droplet Atomization (VIDA) for Two-Phase Thermal Management

Bojan Vukasinovic, Samuel N. Heffington, Marc K. Smith, Ari Glezer

Proc. ASME. IMECE2001, Packaging, Reliability and Manufacturing Issues Associated With Electronic and Photonic Products, 17-24, November 11–16, 2001

Paper No: IMECE2001/EPP-24702

DOI: https://doi.org/10.1115/IMECE2001/EPP-24702

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Topics: Drops, Thermal management, Vibration, Heat transfer, Cooling, Diaphragms (Mechanical devices), Diaphragms (Structural), Heat pipes, Condensation, Condensed matter

Proceedings Papers

Fabrication of an Electromagnetic Micropump for Cerebrospinal Fluid Shunt

Myung Sik Kim, Kee Young Kwon, Sang Wook Lee, Sang Sik Yang

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 793-798, November 11–16, 2001

Paper No: IMECE2001/MEMS-23913

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23913

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Topics: Cerebrospinal fluid, Manufacturing, Microelectromechanical systems, Micropumps, Diaphragms (Mechanical devices), Diaphragms (Structural), Design, Diffusers, Electromagnetic force, Flow (Dynamics)

Proceedings Papers

Magnetically Actuated, Circular Diaphragm Pumps Fabricated With Low-Temperature, Co-Fired Ceramic Tapes and Kapton Polyimide Films: Experiments and Theory

Moon Kim, G. K. Ananthasuresh, Haim H. Bau

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 41-49, November 11–16, 2001

Paper No: IMECE2001/MEMS-23806

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23806

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Topics: Ceramics, Diaphragms (Mechanical devices), Diaphragms (Structural), Low temperature, Microelectromechanical systems, Pumps, Design, Copper, Finite element methods, Currents

Proceedings Papers

Variable Gap-Reluctance Linear Motor With Application to Linear Resonance Compressors

Vernon W. Popham, Christopher C. Lawrenson, Ronald F. Burr, Bart Lipkens

Proc. ASME. IMECE2001, Noise Control and Acoustics, 177-186, November 11–16, 2001

Paper No: IMECE2001/NCA-23518

DOI: https://doi.org/10.1115/IMECE2001/NCA-23518

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Topics: Compressors, Diaphragms (Mechanical devices), Diaphragms (Structural), Linear motors, Resonance

Proceedings Papers

Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers

Meng-Nian Niu, Eun Sok Kim

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 269-274, November 5–10, 2000

Paper No: IMECE2000-1102

DOI: https://doi.org/10.1115/IMECE2000-1102

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Microelectromechanical systems, Pressure transducers, Stress, Microphones, Displacement, Reactive-ion etching, Compressive stress, Etching

Proceedings Papers

Partially Etched Holes for Residual Stress Release in Diaphragm-Based Pressure Sensors

Meng-Nian Niu, Fred J. von Preissig, Eun Sok Kim

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 227-232, November 5–10, 2000

Paper No: IMECE2000-1096

DOI: https://doi.org/10.1115/IMECE2000-1096

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Pressure sensors, Stress, Microphones, Acoustics, Displacement, Etching, Finite element methods, Finite element model

Proceedings Papers

Fabrication and Test of an Electromagnetic Micro Actuator With a Planar Coil on a Parylene Diaphragm

Ki Hoon Kim, Sang Sik Yang

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 281-286, November 5–10, 2000

Paper No: IMECE2000-1104

DOI: https://doi.org/10.1115/IMECE2000-1104

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Manufacturing, Microactuators, Actuators, Deflection, Micropumps, Displacement, Lasers, Magnets

Proceedings Papers

Packaged Parylene-Diaphragm Piezoelectric Microspeaker

Cheol-Hyun Han, Eun Sok Kim

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 111-115, November 5–10, 2000

Paper No: IMECE2000-1079

DOI: https://doi.org/10.1115/IMECE2000-1079

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Acoustics, Sound pressure, Vibration, Elastic moduli, Electrodes, Lasers, Micromachining, Packaging

Proceedings Papers

A Surface-Micromachined Nitride-Diaphragm High-Pressure Sensor for Oil Well Application

Yong Xu, Fukang Jiang, Yu-Chong Tai, Eric Donzier, William A. Loomis, Arthur D. Liberman

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 425-429, November 5–10, 2000

Paper No: IMECE2000-1126

DOI: https://doi.org/10.1115/IMECE2000-1126

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), High pressure (Physics), Micromachining, Oil wells, Sensors, Excitation, Piezoresistors, Polysilicon, Pressure

Proceedings Papers

Meso-Scale Electromagnetic Pumps Fabricated With Low-Temperature Co-Fired Ceramic Tapes and Kapton Polyimide Films

Moon Kim, G. K. Ananthasuresh, Haim H. Bau

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 249-254, November 5–10, 2000

Paper No: IMECE2000-1099

DOI: https://doi.org/10.1115/IMECE2000-1099

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Topics: Ceramics, Low temperature, Pumps, Diaphragms (Mechanical devices), Diaphragms (Structural), Design, Flow (Dynamics), Permanent magnets, Copper, Fluid dynamics

2 3 4 5

NARROW

Lung-Diaphragm Model of the Respiratory System for Parameter Estimation Studies

Analysis on Multi-Layered, Corrugated Diaphragm With Residual Stress

Numerical Simulation and Design of the Four-Terminal Piezoresistive Pressure Transducer

On the Modeling of the Wheatstone-Bridge Piezoresistive Pressure Sensor: A Finite-Element-Based Approach

Development of a Latching Valve for Micro-Chem-Lab™

A Novel Fabrication Methodology for Micromachined Sensor-Arrays With Multi-Thickness Configuration

A New Transverse Electromagnetic Microactuator Using the Radial Magnetic Field Guided by Symmetric Twin Magnets

Coupled Electrostatics-Structures-Fluidic Simulations of a Bead Mesopump

Extensive Experimental Study on Diaphragm-Based Piezoelectric Microphone

The Fabrication and Test of a Phase-Change Micropump

Vibration-Induced Droplet Atomization (VIDA) for Two-Phase Thermal Management

Fabrication of an Electromagnetic Micropump for Cerebrospinal Fluid Shunt

Magnetically Actuated, Circular Diaphragm Pumps Fabricated With Low-Temperature, Co-Fired Ceramic Tapes and Kapton Polyimide Films: Experiments and Theory

Variable Gap-Reluctance Linear Motor With Application to Linear Resonance Compressors

Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers

Partially Etched Holes for Residual Stress Release in Diaphragm-Based Pressure Sensors

Fabrication and Test of an Electromagnetic Micro Actuator With a Planar Coil on a Parylene Diaphragm

Packaged Parylene-Diaphragm Piezoelectric Microspeaker

A Surface-Micromachined Nitride-Diaphragm High-Pressure Sensor for Oil Well Application

Meso-Scale Electromagnetic Pumps Fabricated With Low-Temperature Co-Fired Ceramic Tapes and Kapton Polyimide Films

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