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Proceedings Papers

Stitching Technology Using Hybrid Actuators in Nano Imprint

Cheng-Hung Chen, Jia-Yush Yen, Lien-Sheng Chen, Shuo-Hung Chang

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 683-687, August 3–6, 2008

Paper No: DETC2008-49260

DOI: https://doi.org/10.1115/DETC2008-49260

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Topics: Actuators, Diffraction gratings, Integrated circuits, Interferometers, Lasers, Lithography, Nanotechnology, Periodic structures, Printing, Resolution (Optics)

Proceedings Papers

Three Dimensional Behavior of Fully Compliant Bistable Micromechanisms

Brian B. Cherry, Larry L. Howell

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 619-628, August 3–6, 2008

Paper No: DETC2008-49525

DOI: https://doi.org/10.1115/DETC2008-49525

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Topics: Micromechanical devices, Deflection, Stress, Design, Finite element model, Rotation, Yaw

Proceedings Papers

A Novel Linear MEMS Capacitor With Triangular Electrodes and Nonlinear Structural Stiffness

Mohammad Shavezipur, Seyed Mohammad Hashemi, Amir Khajepour

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 819-824, August 3–6, 2008

Paper No: DETC2008-49270

DOI: https://doi.org/10.1115/DETC2008-49270

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Topics: Capacitors, Electrodes, Microelectromechanical systems, Stiffness, Design, Capacitance, Computer simulation, Geometry, Physics, Plates (structures)

Proceedings Papers

Enabling Soft Lithography Using an Atomic Force Microscope

Matthew S. Johannes, Daniel G. Cole, Robert L. Clark

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 749-757, August 3–6, 2008

Paper No: DETC2008-49877

DOI: https://doi.org/10.1115/DETC2008-49877

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Topics: Atomic force microscopy, Lithography, Nanoscale phenomena, Anisotropy, Design, Etching, Molding, Nanolithography, Nanostructures , Silicon

Proceedings Papers

The Effect of Sub-Wavelength Structure Morphology on Anti-Reflection Properties

Hung-Yi Lin, Jen-Hui Tsai, Shuo-Hung Chang, Tung-Chuan Wu, Mao-Kuo Wei

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 689-693, August 3–6, 2008

Paper No: DETC2008-49647

DOI: https://doi.org/10.1115/DETC2008-49647

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Topics: Reflection, Wavelength

Proceedings Papers

Nano-Scale Impact Characteristics of Rough Surfaces in Humid Atmosphere With Full or Partial SAM Protection

Mircea Teodorescu, Stephanos Theodossiades, Homer Rahnejat

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 561-568, August 3–6, 2008

Paper No: DETC2008-49949

DOI: https://doi.org/10.1115/DETC2008-49949

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Topics: Nanoscale phenomena, Surface roughness, Adhesion, Design, Dynamics (Mechanics), Microscale devices, Physics

Proceedings Papers

Novel Linearly Tunable MEMS Capacitors With Flexible Moving Electrodes

Mohammad Shavezipur, Seyed Mohammad Hashemi, Amir Khajepour

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 825-830, August 3–6, 2008

Paper No: DETC2008-49272

DOI: https://doi.org/10.1115/DETC2008-49272

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Topics: Capacitors, Electrodes, Microelectromechanical systems, Design, Boundary-value problems, Capacitance, Design methodology, Displacement, Finite element methods, Finite element model

Proceedings Papers

Adaptive Servo Controller Design in an Optical Trap

Kurt D. Wulff, Daniel G. Cole, Robert L. Clark

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 759-764, August 3–6, 2008

Paper No: DETC2008-49884

DOI: https://doi.org/10.1115/DETC2008-49884

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Topics: Control equipment, Design, Servomechanisms, Dynamics (Mechanics), Actuators, Biophysics, Brownian motion, Control systems, Noise (Sound), Particulate matter

Proceedings Papers

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Ozlem Sardan, Karin N. Andersen, A. Nicole MacDonald, Ole Sigmund, Peter Bo̸ggild, Andy Horsewell

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 629-631, August 3–6, 2008

Paper No: DETC2008-49543

DOI: https://doi.org/10.1115/DETC2008-49543

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Topics: Focused ion beams, Polysilicon, Topology, End effectors, Manufacturing, Milling, Photolithography

Proceedings Papers

Molecular Dynamics Analysis of Formation and Friction on Pattern Replication in Direct Nanoimprint

Cheng-Kuo Sung, Chih-Wei Hsieh

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 695-700, August 3–6, 2008

Paper No: DETC2008-49766

DOI: https://doi.org/10.1115/DETC2008-49766

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Topics: Friction, Molecular dynamics, Nanostructures , Silicon, Aluminum, Cavities, Engineering simulation, Film thickness, Manufacturing, Nickel

Proceedings Papers

An Investigation on the Profile of Microlens by the Thermal Reflow Process Due to Surface Tension and Gravity

Jhy-Cherng Tsai, Yong-Sung Hsu

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 569-572, August 3–6, 2008

Paper No: DETC2008-50077

DOI: https://doi.org/10.1115/DETC2008-50077

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Topics: Gravity (Force), Surface tension, Drops, Photoresists, Melting, Pattern formation, Silicon, Theoretical analysis

Proceedings Papers

Microgrooves Enhanced AC Electrothermal Pumping for High Conductivity Microfluids

E. Du, Souran Manoochehri

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 831-837, August 3–6, 2008

Paper No: DETC2008-49492

DOI: https://doi.org/10.1115/DETC2008-49492

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Topics: Electrical conductivity, Thermal conductivity, Computer simulation, Fluids, Temperature, Theoretical analysis

Proceedings Papers

Development of a Self-Excited Oscillator for SI-Traceable Measurements in Atomic Force Microscopy

Gregory W. Vogl, Jon R. Pratt

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 765-774, August 3–6, 2008

Paper No: DETC2008-49931

DOI: https://doi.org/10.1115/DETC2008-49931

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Topics: Atomic force microscopy, Cantilevers, Control systems, Metric system, Q-factor, Quartz, Sensors, Transducers, Vacuum

Proceedings Papers

Heat Transport in the Al Nanopowder

C. Y. Ho, C. S. Shih, M. Y. Wen, C. Ma

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 517-521, August 3–6, 2008

Paper No: DETC2008-49238

DOI: https://doi.org/10.1115/DETC2008-49238

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Topics: Heat, Temperature, Lasers, Aluminum powders, Bulk solids, Cladding systems (Building), Heat transfer, Insulation, Nanoparticles, Powder metallurgy

Proceedings Papers

Calibration Approach for Thermomechanical In-Plane Microactuator Self-Sensing

Kendall B. Teichert, Brian D. Jensen

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 633-640, August 3–6, 2008

Paper No: DETC2008-49546

DOI: https://doi.org/10.1115/DETC2008-49546

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Topics: Calibration, Microactuators, Thermomechanics, Microelectromechanical systems, Manufacturing, Materials properties, Model validation, Sensors, Signals, Silicon

Proceedings Papers

Robust Design of Flexure Based Nano Precision Compliant Mechanisms With Application to Nano Imprint Lithography

Chinmaya B. Patil, S. V. Sreenivasan, Raul G. Longoria

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 701-711, August 3–6, 2008

Paper No: DETC2008-50114

DOI: https://doi.org/10.1115/DETC2008-50114

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Topics: Bending (Stress), Compliant mechanisms, Design, Lithography, Flexure mechanisms, Errors, Machining, Optimization, Calibration, Screws

Proceedings Papers

An Investigation for the Nonlinear Effects of Squeeze Film Damping and Electrostatic Forces on the Shock Spectrum of a Capacitive Accelerometer

Mahmoud I. Ibrahim, Mohammad I. Younis

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 573-580, August 3–6, 2008

Paper No: DETC2008-50143

DOI: https://doi.org/10.1115/DETC2008-50143

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Topics: Accelerometers, Damping, Shock (Mechanics), Deflection, Simulation results, Microelectromechanical systems, Spectra (Spectroscopy)

Proceedings Papers

Surface Finishing Using Carbon Nanotube Forest

Tsung-Cho Wu, Neng-Kai Chang, Chi-Chung Su, Ping-Kung Huang, Yao-Yang Tsai, Hung-Yi Lin, Shuo-Hung Chang

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 523-527, August 3–6, 2008

Paper No: DETC2008-49461

DOI: https://doi.org/10.1115/DETC2008-49461

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Topics: Carbon nanotubes, Surface finishing, Brass (Metal), Surface roughness, Semiconductor wafers, Wheels, Bushings, Chemical vapor deposition, Milling machines, Nanoscale phenomena

Proceedings Papers

Fabrication and Characterization of Biologically Inspired Mushroom-Shaped Elastomer Microfiber Arrays

Seok Kim, Metin Sitti

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 839-847, August 3–6, 2008

Paper No: DETC2008-49825

DOI: https://doi.org/10.1115/DETC2008-49825

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Topics: Elastomers, Manufacturing, Polyester fibers, Adhesion, Fibers, Friction, Glass, Lithography, Nanoscale phenomena, Reactive-ion etching

Proceedings Papers

Nanomechanical Peeling of Carbon Nanotubes and Nanocoils Studied Using the Atomic Force Microscope

Mark C. Strus, Arvind Raman, Luis Zalamea, R. Byron Pipes

Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 775-781, August 3–6, 2008

Paper No: DETC2008-50020

DOI: https://doi.org/10.1115/DETC2008-50020

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Topics: Atomic force microscopy, Carbon nanotubes, Nanotubes, Adhesion, Nanocomposites, Physics, Coatings, Fibers, Modeling, Nanoelectronics

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NARROW

Stitching Technology Using Hybrid Actuators in Nano Imprint

Three Dimensional Behavior of Fully Compliant Bistable Micromechanisms

A Novel Linear MEMS Capacitor With Triangular Electrodes and Nonlinear Structural Stiffness

Enabling Soft Lithography Using an Atomic Force Microscope

The Effect of Sub-Wavelength Structure Morphology on Anti-Reflection Properties

Nano-Scale Impact Characteristics of Rough Surfaces in Humid Atmosphere With Full or Partial SAM Protection

Novel Linearly Tunable MEMS Capacitors With Flexible Moving Electrodes

Adaptive Servo Controller Design in an Optical Trap

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Molecular Dynamics Analysis of Formation and Friction on Pattern Replication in Direct Nanoimprint

An Investigation on the Profile of Microlens by the Thermal Reflow Process Due to Surface Tension and Gravity

Microgrooves Enhanced AC Electrothermal Pumping for High Conductivity Microfluids

Development of a Self-Excited Oscillator for SI-Traceable Measurements in Atomic Force Microscopy

Heat Transport in the Al Nanopowder

Calibration Approach for Thermomechanical In-Plane Microactuator Self-Sensing

Robust Design of Flexure Based Nano Precision Compliant Mechanisms With Application to Nano Imprint Lithography

An Investigation for the Nonlinear Effects of Squeeze Film Damping and Electrostatic Forces on the Shock Spectrum of a Capacitive Accelerometer

Surface Finishing Using Carbon Nanotube Forest

Fabrication and Characterization of Biologically Inspired Mushroom-Shaped Elastomer Microfiber Arrays

Nanomechanical Peeling of Carbon Nanotubes and Nanocoils Studied Using the Atomic Force Microscope

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