Abstract

The sAFAM is a novel mm-size microrobot built using MicroElectroMechanical Systems (MEMS) technology. It consists of a monolithically fabricated microrobotic arm assembled onto four in-plane actuators, capable of moving along four degrees of freedom, including translational movement in X and Y axes as well as pitch and yaw. In this paper, several design modifications were proposed to increase movement precision, stability, and controllability to the sAFAM tip. An interface is developed to assist a human operator accurately position the microrobot tip during nano-object handling. A Python-based graphical user interface (GUI) was programmed to make it intuitive for an operator to use and obtain required tip precision under a microscope. Experimental results demonstrate the functionality of the proposed control solution, and the tip motion resolution using microscope images of the microrobot tip under 20x magnification during operation. The hardware and software requirements for the proposed experimental setup and control platform are discussed in detail.

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