Research Papers

A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica

[+] Author and Article Information
Han Wang

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China
e-mail: hongjiaohuang@sjtu.edu.cn

Hong Shen

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of Mechanical System and Vibration,
Shanghai, 200240, China
e-mail: sh_0320@msn.com

Zhenqiang Yao

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of Mechanical System and Vibration,
Shanghai, 200240, China
e-mail: zqyao@sjtu.edu.cn

1Corresponding author.

Manuscript received January 22, 2018; final manuscript received March 22, 2019; published online April 12, 2019. Assoc. Editor: Hongqiang Chen.

J. Manuf. Sci. Eng 141(6), 061004 (Apr 12, 2019) (10 pages) Paper No: MANU-18-1048; doi: 10.1115/1.4043308 History: Received January 22, 2018; Accepted March 25, 2019

The morphology of microchannels machined by multiple ultrafast laser pulses with 500 fs and 8 ps durations on fused silica plate is predicted by a two-step model with experimental validation in present work. A spike structure at crater boundary with different scales in 500 fs and 8 ps pulse ablation is found in the numerical investigation, which could be attributed to diffraction and attenuation of light intensity in both cases. To analyze the evolution of crater morphology and damaged area with an increasing number of pulses, the distribution of light intensity, lattice temperature, and self-trapped excitons density during certain pulses are studied. The results showed that 500 fs pulses lead to smoother crater boundary, smaller heat affected zone, and larger electrical damage area with respect to 8 ps pulses.

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Grover, W. H., and Mathies, R. A., 2005, “An Integrated Microfluidic Processor for Single Nucleotide Polymorphism-Based DNA Computing,” Lab Chip, 5(10), pp. 1033–1040. [CrossRef] [PubMed]
Sugioka, K., Hanada, Y., and Midorikawa, K., 2010, “Three-Dimensional Femtosecond Laser Micromachining of Photosensitive Glass for Biomicrochips,” Laser Photonics Rev., 4(3), pp. 386–400. [CrossRef]
Balling, P., and Schou, J., 2013, “Femtosecond-Laser Ablation Dynamics of Dielectrics: Basics and Applications for Thin Films,” Rep. Prog. Phys., 76(3), p. 036502. [CrossRef] [PubMed]
Mao, S. S., Quéré, F., Guizard, S., Mao, X., Russo, R. E., Petite, G., and Martin, P., 2004, “Dynamics of Femtosecond Laser Interactions With Dielectrics,” Appl. Phys. A: Mater. Sci. Process., 79(7), pp. 1695–1709. [CrossRef]
Schaffer, C. B., Brodeur, A., García, J. F., and Mazur, E., 2001, “Micromachining Bulk Glass by Use of Femtosecond Laser Pulses With Nanojoule Energy,” Opt. Lett., 26(2), pp. 93–95. [CrossRef] [PubMed]
Che, D., Saxena, I., Han, P., Guo, P., and Ehmann, K. F., 2014, “Machining of Carbon Fiber Reinforced Plastics/Polymers: A Literature Review,” ASME J. Manuf. Sci. Eng., 136(3), p. 034001. [CrossRef]
Wang, H., Yao, Y. L., and Chen, H., 2015, “Removal Mechanism and Defect Characterization for Glass-Side Laser Scribing of CdTe/CdS Multilayer in Solar Cells,” ASME J. Manuf. Sci. Eng., 137(6), p. 061006. [CrossRef]
Shen, H., Jiang, J., Feng, D., Xing, C., Zhao, X., and Xiao, P., 2019, “Environmental Effect on the Crack Behavior of Yttria-Stabilized Zirconia During Laser Drilling,” ASME J. Manuf. Sci. Eng., 141(5), p. 054501. [CrossRef]
Kamata, M., and Obara, M., 2004, “Control of the Refractive Index Change in Fused Silica Glasses Induced by a Loosely Focused Femtosecond Laser,” Appl. Phys. A: Mater. Sci. Process., 78(1), pp. 85–88. [CrossRef]
Li, Y., and Qu, S., 2013, “Water-Assisted Femtosecond Laser Ablation for Fabricating Three-Dimensional Microfluidic Chips,” Curr. Appl. Phys., 13(7), pp. 1292–1295. [CrossRef]
Stuart, B. C., Feit, M. D., Herman, S., Rubenchik, A. M., Shore, B. W., and Perry, M. D., 1996, “Nanosecond-to-Femtosecond Laser-Induced Breakdown in Dielectrics,” Phys. Rev. B, 53(4), pp. 1749. [CrossRef]
Wang, H., and Shen, H., 2017, “A Prediction Model for Ablation Fluence Threshold in Femtosecond Laser Processing of Fused Silica,” J. Micro Nano-Manuf., 5(3), p. 031006. [CrossRef]
Chimier, B., Utéza, O., Sanner, N., Sentis, M., Itina, T., Lassonde, P., Légaré, F., Vidal, F., and Kieffer, J. C., 2011, “Damage and Ablation Thresholds of Fused-Silica in Femtosecond Regime,” Phys. Rev. B, 84(9), p. 094104. [CrossRef]
Jiang, L., and Tsai, H. L., 2005, “Modeling the Femtosecond Laser Pulse-Train Ablation of Dielectrics,” ASME 2005 International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 5–11, American Society of Mechanical Engineers, New York, pp. 955–962.
Jiang, L., and Tsai, H. L., 2008, “A Plasma Model Combined With an Improved Two-Temperature Equation for Ultrafast Laser Ablation of Dielectrics,” ASME J. Appl. Phys., 104(9), p. 093101. [CrossRef]
Audebert, P., Daguzan, P., Dos Santos, A., Gauthier, J. C., Geindre, J. P., Guizard, S., Hamoniaux, G., Krastev, K., Martin, P., Petite, G., and Antonetti, A., 1994, “Space-Time Observation of an Electron Gas in SiO2,” Phys. Rev. Lett., 73(14), p. 1990. [CrossRef] [PubMed]
de Aldana, J. V., Méndez, C., Roso, L., and Moreno, P., 2005, “Propagation of Ablation Channels With Multiple Femtosecond Laser Pulses in Dielectrics: Numerical Simulations and Experiments,” J. Phys. D: Appl. Phys., 38(16), pp. 2764. [CrossRef]
de Aldana, J. V., Méndez, C., and Roso, L., (2006), “Saturation of Ablation Channels Micro-Machined in Fused Silica With Many Femtosecond Laser Pulses,” Opt. Express, 14(3), pp. 1329–1338. [CrossRef] [PubMed]
Sun, M., Eppelt, U., Russ, S., Hartmann, C., Siebert, C., Zhu, J., and Schulz, W., 2013, “Numerical Analysis of Laser Ablation and Damage in Glass With Multiple Picosecond Laser Pulses,” Opt. Express, 21(7), pp. 7858–7867. [CrossRef] [PubMed]
Sun, M., Eppelt, U., Hartmann, C., Schulz, W., Zhu, J., and Lin, Z., 2016, “Damage Morphology and Mechanism in Ablation Cutting of Thin Glass Sheets With Picosecond Pulsed Lasers,” Opt. Laser Technol., 80, pp. 227–236. [CrossRef]
Vogel, A., Noack, J., Hüttman, G., and Paltauf, G., 2005, “Mechanisms of Femtosecond Laser Nanosurgery of Cells and Tissues,” Appl. Phys. B, 81(8), pp. 1015–1047. [CrossRef]
Li, M., Menon, S., Nibarger, J. P., and Gibson, G. N., 1999, “Ultrafast Electron Dynamics in Femtosecond Optical Breakdown of Dielectrics,” Phys. Rev. Lett., 82(11), pp. 2394. [CrossRef]
Du, D., Liu, X., Korn, G., Squier, J., and Mourou, G., 1994, “Laser-Induced Breakdown by Impact Ionization in SiO2 With Pulse Widths From 7 ns to 150 fs,” Appl. Phys. Lett., 64(23), pp. 3071–3073. [CrossRef]
Tien, A. C., Backus, S., Kapteyn, H., Murnane, M., and Mourou, G., 1999, “Short-Pulse Laser Damage in Transparent Materials as a Function of Pulse Duration,” Phys. Rev. Lett., 82(19), pp. 3883. [CrossRef]
Sudrie, L., Couairon, A., Franco, M., Lamouroux, B., Prade, B., Tzortzakis, S., and Mysyrowicz, A., 2002, “Femtosecond Laser-Induced Damage and Filamentary Propagation in Fused Silica,” Phys. Rev. Lett., 89(18), p. 186601. [CrossRef] [PubMed]
Kruer, W. L., 1988, The Physics of Laser Plasma Interactions, Addison-Wesley, Boston, MA.
Jiang, L., and Tsai, H. L., 2005, “Energy Transport and Material Removal in Wide Bandgap Materials by a Femtosecond Laser Pulse,” Int. J. Heat Mass Transfer, 48(3–4), pp. 487–499. [CrossRef]
Bulgakova, N., Stoian, R., Rosenfeld, A., Hertel, I., and Campbell, E., 2004, “Electronic Transport and Consequences for Material Removal in Ultrafast Pulsed Laser Ablation of Materials,” Phys. Rev. B, 69(5), p. 054102. [CrossRef]
Rethfeld, B., Ivanov, D. S., Garcia, M. E., and Anisimov, S. I., 2017, “Modelling Ultrafast Laser Ablation,” J. Phys. D: Appl. Phys., 50(19), p. 193001. [CrossRef]
Rethfeld, B., 2006, “Free-Electron Generation in Laser-Irradiated Dielectrics,” Phys. Rev. B, 73(3), p. 035101. [CrossRef]
Richter, S., Jia, F., Heinrich, M., Döring, S., Peschel, U., Tünnermann, A., and Nolte, S., 2012, “The Role of Self-Trapped Excitons and Defects in the Formation of Nanogratings in Fused Silica,” Opt. Lett., 37(4), pp. 482–484. [CrossRef] [PubMed]


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Fig. 1

Interaction between laser and fused silica

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Fig. 2

Structure of the present model

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Fig. 4

Basic physical processes involved in ionization model

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Fig. 6

Ultrafast laser scanning experiments: (a) 500 fs scanning system and (b) 8 ps scanning system

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Fig. 7

Spatial overlap and equivalent fluence: (a) spatial overlap and (b) average fluence

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Fig. 8

Shape comparison between numerical and experimental results: (a) 500 fs and (b) 8 ps

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Fig. 9

Radius and depth of crater by 5/10/15 times scanning with 500 fs and 8 ps pulses

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Fig. 10

The development of crater shape with 15 pulses: (a) 500 fs and (b) 8 ps

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Fig. 11

Base-10 logarithmic laser intensity (W/m2) distribution during the 2nd/5th/7th/10th/12th/15th pulse: (a) 500 fs and (b) 8 ps

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Fig. 12

Lattice temperature (K) distribution during the 1st and 2nd pulse: (a) 500 fs and (b) 8 ps

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Fig. 13

Base-10 logarithmic STE density (m−3) distribution during the 2nd/5th/7th/10th/12th/15th pulse: (a) 500 fs and (b) 8 ps



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