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Research Papers

A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica

[+] Author and Article Information
Han Wang

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China
e-mail: hongjiaohuang@sjtu.edu.cn

Hong Shen

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of Mechanical System and Vibration,
Shanghai, 200240, China
e-mail: sh_0320@msn.com

Zhenqiang Yao

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of Mechanical System and Vibration,
Shanghai, 200240, China
e-mail: zqyao@sjtu.edu.cn

1Corresponding author.

Manuscript received January 22, 2018; final manuscript received March 22, 2019; published online April 12, 2019. Assoc. Editor: Hongqiang Chen.

J. Manuf. Sci. Eng 141(6), 061004 (Apr 12, 2019) (10 pages) Paper No: MANU-18-1048; doi: 10.1115/1.4043308 History: Received January 22, 2018; Accepted March 25, 2019

The morphology of microchannels machined by multiple ultrafast laser pulses with 500 fs and 8 ps durations on fused silica plate is predicted by a two-step model with experimental validation in present work. A spike structure at crater boundary with different scales in 500 fs and 8 ps pulse ablation is found in the numerical investigation, which could be attributed to diffraction and attenuation of light intensity in both cases. To analyze the evolution of crater morphology and damaged area with an increasing number of pulses, the distribution of light intensity, lattice temperature, and self-trapped excitons density during certain pulses are studied. The results showed that 500 fs pulses lead to smoother crater boundary, smaller heat affected zone, and larger electrical damage area with respect to 8 ps pulses.

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Figures

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Fig. 1

Interaction between laser and fused silica

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Fig. 2

Structure of the present model

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Fig. 4

Basic physical processes involved in ionization model

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Fig. 6

Ultrafast laser scanning experiments: (a) 500 fs scanning system and (b) 8 ps scanning system

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Fig. 7

Spatial overlap and equivalent fluence: (a) spatial overlap and (b) average fluence

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Fig. 8

Shape comparison between numerical and experimental results: (a) 500 fs and (b) 8 ps

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Fig. 9

Radius and depth of crater by 5/10/15 times scanning with 500 fs and 8 ps pulses

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Fig. 10

The development of crater shape with 15 pulses: (a) 500 fs and (b) 8 ps

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Fig. 11

Base-10 logarithmic laser intensity (W/m2) distribution during the 2nd/5th/7th/10th/12th/15th pulse: (a) 500 fs and (b) 8 ps

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Fig. 12

Lattice temperature (K) distribution during the 1st and 2nd pulse: (a) 500 fs and (b) 8 ps

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Fig. 13

Base-10 logarithmic STE density (m−3) distribution during the 2nd/5th/7th/10th/12th/15th pulse: (a) 500 fs and (b) 8 ps

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