0
Research Papers

Radial Error Motion Measurement of Ultraprecision Axes of Rotation With Nanometer Level Precision

[+] Author and Article Information
Qiang Shu

Institute of Systems Engineering,
China Academy of Engineering Physics,
Miansan Road No. 64,
Mianyang 621999, China
e-mail: qiangzhongshu@126.com

Mingzhi Zhu

Institute of Systems Engineering,
China Academy of Engineering Physics,
Miansan Road No. 64,
Mianyang 621999, China
e-mail: 409shuq@caep.cn

XingBao Liu

Institute of Mechanical Manufacturing and Technology,
China Academy of Engineering Physics,
Miansan Road No. 64,
Mianyang 621999, China
e-mail: 492235990@qq.com

Heng Cheng

Institute of Mechanical Manufacturing and Technology,
China Academy of Engineering Physics,
Miansan Road No. 64,
Mianyang 621999, China
e-mail: tech_endless@163.com

Manuscript received September 10, 2016; final manuscript received March 19, 2017; published online April 18, 2017. Assoc. Editor: Laine Mears.

J. Manuf. Sci. Eng 139(7), 071017 (Apr 18, 2017) (11 pages) Paper No: MANU-16-1494; doi: 10.1115/1.4036349 History: Received September 10, 2016; Revised March 19, 2017

Error motion of an ultraprecision axis of rotation has great influences on form error of machined parts. This paper gives a complete error analysis for the measurement procedure including nonlinearity error of capacitive displacement probes, misalignment error of the probes, eccentric error of artifact balls, environmental error, and error caused by different error separation methods. Nonlinearity of the capacitive displacement probe targeting a spherical surface is investigated through experiments. It is found that the additional probe output caused by lateral offset of the probe relative to the artifact ball greatly affects the measurement accuracy. Furthermore, it is shown that error motions in radial and axial directions together with eccentric rotation of the artifact lead to lateral offset. A novel measurement setup which integrates an encoder and an adjustable artifact is designed to ensure measurement repeatability by a zero index signal from the encoder. Moreover, based on the measurement setup, once roundness of the artifact is calibrated, roundness of the artifact can be accurately compensated when radial error motion is measured, and this method improves measurement efficiency while approaches accuracy comparable to that of error separation methods implemented alone. Donaldson reversal and three-probe error separation methods were implemented, and the maximum difference of the results of the two methods is below 14 nm. Procedure of uncertainty estimation of radial error motion is given in detail by analytical analysis and Monte Carlo simulation. The combined uncertainty of radial error motion measurement of an aerostatic spindle with Donaldson reversal and three-probe methods is 14.8 nm and 13.9 nm (coverage k = 2), respectively.

Copyright © 2017 by ASME
Topics: Errors , Probes , Uncertainty
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Fig. 1

Error motion of a rotation axis

Grahic Jump Location
Fig. 2

Illustration of synchronous and unsychrounous motion

Grahic Jump Location
Fig. 3

Donaldson reversal error separating method

Grahic Jump Location
Fig. 4

Multistep error separating method

Grahic Jump Location
Fig. 5

Three-probe method for separating form error of artifact

Grahic Jump Location
Fig. 6

Experiment setup for error separating methods

Grahic Jump Location
Fig. 7

Compensating form error of using an encoder to indicate the starting point of roundness

Grahic Jump Location
Fig. 8

Experiment setup to investigate nonlinearity of capacitive probes targeting ball surface

Grahic Jump Location
Fig. 9

Probe readings of a spherical surface versus that of a flat surface

Grahic Jump Location
Fig. 10

The capacitive probe output characteristic when moving different lateral distances

Grahic Jump Location
Fig. 11

Experiment data to identify output characteristic of the capacitive probe when moving toward to a spherical surface at different lateral offset distances

Grahic Jump Location
Fig. 12

Residual error after removing the first-order component from the simulated signal under different indexing error bounds

Grahic Jump Location
Fig. 13

Eccentric error induced lateral offset

Grahic Jump Location
Fig. 14

General misalignment between the probe and the artifact

Grahic Jump Location
Fig. 15

Environmental errors when the spindle is stationary: (a) thermal drift and the filtered data, (b) the corresponding frequency distribution, and (c) the corresponding temperature

Grahic Jump Location
Fig. 16

Illustration of positioning error of Donaldson reversal method: (a) positioning error of the artifact ball and (b) positioning error of the probe

Grahic Jump Location
Fig. 17

Standard deviation of measurement error caused by angular errors of measurement setup

Grahic Jump Location
Fig. 18

Radial error motion of spindle using Donald reversal and three-probe methods

Grahic Jump Location
Fig. 19

Roundness of artifact ball using Donald reversal and three-probe methods

Grahic Jump Location
Fig. 20

Radial error motion of spindle in frequency domain using Donald reversal and three-probe methods

Grahic Jump Location
Fig. 21

Radial error motion of the spindle of a diamond lathe using compensating roundness method

Grahic Jump Location
Fig. 22

Roundness of the same artifact using Donaldson reversal method on a diamond lathe

Grahic Jump Location
Fig. 23

Procedures of radial error motion determination

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In