Research Papers

Experimental Study of Process Emissions From Atomic Layer Deposition of Al2O3 Under Various Temperatures and Purge Time

[+] Author and Article Information
Lulu Ma, Yuanyuan Xie, Fenfen Wang

Department of Mechanical Engineering,
University of Wisconsin Milwaukee,
Milwaukee, WI 53211

Dongqing Pan

Department of Engineering Technology,
University of North Alabama,
Florence, AL 35632

Chris Yuan

Department of Mechanical and
Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
e-mail: Chris.yuan@case.edu

1Corresponding author.

Manuscript received July 28, 2016; final manuscript received January 8, 2017; published online January 30, 2017. Assoc. Editor: Y.B. Guo.

J. Manuf. Sci. Eng 139(5), 051013 (Jan 30, 2017) (7 pages) Paper No: MANU-16-1407; doi: 10.1115/1.4035722 History: Received July 28, 2016; Revised January 08, 2017

Experimental investigations of process emissions from atomic layer deposition (ALD) of Al2O3 are accomplished under various temperatures and purge times to understand its environmental sustainability performance. About 93% of Trimethylaluminum (TMA) is found flowing through ALD system without deposition. 2–9 × 104 of ultrafine nanoparticles containing 51.9 ± 4.6% of C, 16.6 ± 0.9% of Al, 31.4 ± 4.1% of O are generated during each cycle of reactions. 0.34–0.38 cm3 of CH4 (25 °C, 1 atm), which takes up 45–51% of C contained in TMA is produced simultaneously. The concentration of nanoparticles drops with the increase of purge time. CH4 also has a trend of decreasing but acts more complex with the largest emission at a short purge time. Compared with temperature, which has limited effects on reactants, purge time changes the time of reaction as well as the degree of gas phase mixing, and therefore greatly influences ALD emissions.

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Fig. 1

Schematic of savannah 100 ald system

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Fig. 2

Schematics of size distribution measurement and nanoparticle collection

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Fig. 3

Nanoparticle emission versus time of 25 cycles of ALD reactions

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Fig. 4

Number concentration of nanoparticles emitted in each cycle of ALD reaction

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Fig. 5

Size distribution of nanoparticles emitted from ALD reactions

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Fig. 6

Morphology of nanoparticles. (a), (b), and (c) are measured by SEM; (d), (e), and (f) are obtained by TEM.

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Fig. 7

Quantitative measurement of CH4 (25 °C, 1 atm) emitted in each cycle of ALD reaction

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Fig. 8

Growth rate of Al2O3 deposition




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