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Research Papers

Processing Optimization in Multiheating Positions for Laser Thermal Adjustment of Actuators

[+] Author and Article Information
Hong Shen

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of
Mechanical System and Vibration,
Shanghai 200240, China
e-mail: sh_0320@sjtu.edu.cn

Han Wang, Jun Hu

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China

Zhenqiang Yao

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of
Mechanical System and Vibration,
Shanghai 200240, China

Manuscript received October 28, 2014; final manuscript received February 9, 2016; published online March 9, 2016. Assoc. Editor: Hongqiang Chen.

J. Manuf. Sci. Eng 138(6), 061012 (Mar 09, 2016) (10 pages) Paper No: MANU-14-1562; doi: 10.1115/1.4032806 History: Received October 28, 2014; Revised February 09, 2016

Laser thermal adjustment as an application of laser forming in microsystems attracts much attention. Previous work on laser thermal adjustment of the two-bridge actuator (TBA) shows that the deformations induced by laser forming are limited. In this paper, an actuator with three cut-outs including six heating positions is designed to enhance the deformation range. A deformation model is developed for such an actuator by introducing the factors of the in-plane and out-of-plane angles to the TBA's formula, which takes energy constraints into account to avoid the melting phenomenon and negative deformations. The deformation range of the three cut-outs actuator (TCA) is determined by using the relation between in-plane and out-of-plane angles of the TBA. The optimization of the processing parameters for the TCA is conducted to reach the designed target position based on the optimization algorithm of adaptive simulated annealing (ASA). The model prediction is validated by the finite-element analysis (FEA) simulation and experiments.

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Figures

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Fig. 1

Schematic diagram of deformations for TBAs (where XoY represents the midsurface of the sheet, and Z-axis is the normal of the sheet): (a) before and (b) after

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Fig. 2

The illustration of deformations for TCAs (AO12 = 20 mm, O12O34 = O34O56 = 9 mm, and O56B = 22 mm): (a) before and (b) after

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Fig. 3

Mesh model for the TCA in laser thermal adjustment

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Fig. 4

Experimental setup

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Fig. 5

Comparison between the fitting results and simulation data for TBAs: (a) in-plane (R2 = 0.96) and (b) out-of-plane (R2 = 0.96)

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Fig. 6

In-plane and out-of-plane deformations at different heating durations and laser powers: (a) in-plane and (b) out-of-plane

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Fig. 7

The energy expression for the peak temperature of 1200 °C (R2: 0.94)

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Fig. 8

Variation of in-plane and out-of-plane angles with heating duration at laser power P = 120 W

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Fig. 9

The deformation behavior of TBAs under the constrained equations: (a) in-plane and (b) out-of-plane

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Fig. 10

Fitting results for the y-direction displacements (R2: 0.93)

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Fig. 11

The relationship between in-plane and out-of-plane angles for TBAs

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Fig. 12

The feasible region for the y–z displacement in positive y-direction for TCAs

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Fig. 13

The optimized results validated by FEM and experiments: (a) simulation and (b) experiment

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