0
Research Papers

Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives

[+] Author and Article Information
Sagil James

Department of Mechanical
and Materials Engineering,
University of Cincinnati,
Cincinnati, OH 45221
e-mail: jamess5@mail.uc.edu

Murali M. Sundaram

Department of Mechanical
and Materials Engineering,
University of Cincinnati,
Cincinnati, OH 45221
e-mail: murali.sundaram@uc.edu

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING. Manuscript received May 15, 2014; final manuscript received July 30, 2014; published online December 12, 2014. Assoc. Editor: Z. J. Pei.

J. Manuf. Sci. Eng 137(2), 021008 (Apr 01, 2015) (6 pages) Paper No: MANU-14-1284; doi: 10.1115/1.4028199 History: Received May 15, 2014; Revised July 30, 2014; Online December 12, 2014

Vibration assisted nano impact-machining by loose abrasives (VANILA) is a novel nanomachining process that combines the principles of vibration-assisted abrasive machining, and tip-based nanomachining, to perform target specific nano abrasive machining of hard and brittle materials. An atomic force microscope (AFM) is used as a platform in this process wherein, nano abrasives, injected in slurry between the workpiece and the vibrating AFM probe, impact the workpiece and cause nanoscale material removal. The objective of this study is to develop a mathematical model to determine the material removal rate (MRR) in the VANILA process. The experimental machining results reveal that the material removal happens primarily in ductile mode due to repeated deformation which happens at near normal angles of impact. A predictive model for MRR during the VANILA process is analytically developed based on elastoplastic impact theory for normal angles of impact. The model is validated through a series of experiments performed on silicon and borosilicate glass substrates and the results confirm that the model is capable of predicting the machining results within 10% deviation.

FIGURES IN THIS ARTICLE
<>
Copyright © 2015 by ASME
Your Session has timed out. Please sign back in to continue.

References

Diegoli, S., Hamlett, C. A. E., Leigh, S., Mendes, P., and Preece, J., 2007, “Engineering Nanostructures at Surfaces Using Nanolithography,” Proc. Inst. Mech. Eng., Part G: J. Aerosp. Eng., 221(4), pp. 589–629. [CrossRef]
Riveros, R. E., Hann, J. N., Taylor, C. R., and Yamaguchi, H., 2013, “Nanoscale Surface Modifications by Magnetic Field-Assisted Finishing,” ASME J. Manuf. Sci. Eng., 135(5), p. 051014. [CrossRef]
Yan, Y., Sun, T., Liang, Y., and Dong, S., 2007, “Investigation on AFM-Based Micro/Nano-CNC Machining System,” Int. J. Mach. Tools Manuf., 47(11), pp. 1651–1659. [CrossRef]
Malshe, A., Rajurkar, K., Virwani, K., Taylor, C., Bourell, D., Levy, G., Sundaram, M., McGeough, J., Kalyanasundaram, V., and Samant, A., 2010, “Tip-Based Nanomanufacturing by Electrical, Chemical, Mechanical and Thermal Processes,” CIRP Annals-Manuf. Technol., 59(2), pp. 628–651. [CrossRef]
James, S., and Sundaram, M. M., 2012, “A Feasibility Study of Vibration Assisted Nano Impact-Machining by Loose Abrasives Using Atomic Force Microscope,” ASME J. Manuf. Sci. Eng., 134(6), p. 061014. [CrossRef]
Kumar, M., Chang, C.-J., Melkote, S. N., and Joseph, V. R., 2013, “Modeling and Analysis of Forces in Laser Assisted Micro Milling,” ASME J. Manuf. Sci. Eng., 135(4), p. 041018. [CrossRef]
Arif, M., Rahman, M., and San, W. Y., 2012, “A Model to Determine the Effect of Tool Diameter on the Critical Feed Rate for Ductile-Brittle Transition in Milling Process of Brittle Material,” ASME J. Manuf. Sci. Eng., 134(5), p. 051012. [CrossRef]
Ruff, A. W., and Wiederhorn, S., 1979, “Erosion by Solid Particle Impact,” Treatise on Materials Science and Technology, Vol. 16, C. M. Preece (ed.), Academic, New York, pp. 69–125.
Ahmed, Y., Cong, W., Stanco, M. R., Xu, Z., Pei, Z., Treadwell, C., Zhu, Y., and Li, Z., 2012, “Rotary Ultrasonic Machining of Alumina Dental Ceramics: A Preliminary Experimental Study on Surface and Subsurface Damages,” ASME J. Manuf. Sci. Eng., 134(6), p. 064501. [CrossRef]
Srinivasu, D., and Axinte, D., 2014, “Mask-Less Pocket Milling of Composites by Abrasive Waterjets: An Experimental Investigation,” ASME J. Manuf. Sci. Eng., 136(4), p. 041005. [CrossRef]
Ichida, Y., Sato, R., Morimoto, Y., and Kobayashi, K., 2005, “Material Removal Mechanisms in Non-Contact Ultrasonic Abrasive Machining,” Wear, 258(1), pp. 107–114. [CrossRef]
Yamaguchi, Y., and Gspann, J., 2002, “Large-Scale Molecular Dynamics Simulations of Cluster Impact and Erosion Processes on a Diamond Surface,” Phys. Rev. B, 66(15), p. 155408. [CrossRef]
Finnie, I., 1960, “Erosion of Surfaces by Solid Particles,” Wear, 3(2), pp. 87–103. [CrossRef]
Kushendarsyah, S., and Sathyan, S., 2013, “Orthogonal Microcutting of Thin Workpieces,” ASME J. Manuf. Sci. Eng., 135(3), p. 031004. [CrossRef]
Jennings, W. H., Head, W. J., and Manning, C., 1976, “A Mechanistic Model for the Prediction of Ductile Erosion,” Wear, 40(1), pp. 93–112. [CrossRef]
Bitter, J., 1963, “A Study of Erosion Phenomena Part I,” Wear, 6(1), pp. 5–21. [CrossRef]
Li, K.-M., Hu, Y.-M., Yang, Z.-Y., and Chen, M.-Y., 2012, “Experimental Study on Vibration-Assisted Grinding,” ASME J. Manuf. Sci. Eng., 134(4), p. 041009. [CrossRef]
Naim, M., and Bahadur, S., 1984, “Work Hardening in Erosion Due to Single-Particle Impacts,” Wear, 98, pp. 15–26. [CrossRef]
Virkar, S. R., and Patten, J. A., 2013, “Combined Effects of Stress and Temperature During Ductile Mode Microlaser Assisted Machining Process,” ASME J. Manuf. Sci. Eng., 135(4), p. 041003. [CrossRef]
Mulik, R. S., and Pandey, P. M., 2012, “Experimental Investigations and Modeling of Finishing Force and Torque in Ultrasonic Assisted Magnetic Abrasive Finishing,” ASME J. Manuf. Sci. Eng., 134(5), p. 051008. [CrossRef]
Evans, A., Gulden, M., and Rosenblatt, M., 1978, “Impact Damage in Brittle Materials in the Elastic-Plastic Response Regime,” Proc. R. Soc. London. A, 361(1706), pp. 343–365. [CrossRef]
Marshall, D., Lawn, B., and Evans, A., 1982, “Elastic/Plastic Indentation Damage in Ceramics: The Lateral Crack System,” J. Am. Ceram. Soc., 65(11), pp. 561–566. [CrossRef]
Aquaro, D., and Fontani, E., 2001, “Erosion of Ductile and Brittle Materials,” Meccanica, 36(6), pp. 651–661. [CrossRef]
Wakuda, M., Yamauchi, Y., and Kanzaki, S., 2002, “Effect of Workpiece Properties on Machinability in Abrasive Jet Machining of Ceramic Materials,” Precis. Eng., 26(2), pp. 193–198. [CrossRef]
Wiederhorn, S., and Hockey, B., 1983, “Effect of Material Parameters on the Erosion Resistance of Brittle Materials,” J. Mater. Sci., 18(3), pp. 766–780. [CrossRef]
Evans, A., and Wilshaw, T. R., 1976, “Quasi-Static Solid Particle Damage in Brittle Solids—I. Observations Analysis and Implications,” Acta Metall., 24(10), pp. 939–956. [CrossRef]
Revenko, I., and Proksch, R., 2000, “Magnetic and Acoustic Tapping Mode Microscopy of Liquid Phase Phospholipid Bilayers and DNA Molecules,” J. Appl. Phys., 87(1), pp. 526–533. [CrossRef]
Rogers, B., York, D., Whisman, N., Jones, M., Murray, K., Adams, J., Sulchek, T., and Minne, S., 2002, “Tapping Mode Atomic Force Microscopy in Liquid With an Insulated Piezoelectric Microactuator,” Rev. Sci. Instrum., 73(9), pp. 3242–3244. [CrossRef]
Zarepour, H., and Yeo, S., 2012, “Predictive Modeling of Material Removal Modes in Micro Ultrasonic Machining,” Int. J. Mach. Tools Manuf., 62, pp. 13–23. [CrossRef]
Gilardi, G., and Sharf, I., 2002, “Literature Survey of Contact Dynamics Modelling,” Mech. Mach. Theory, 37(10), pp. 1213–1239. [CrossRef]
Wu, J., Zhou, S., and Li, X., 2013, “Acoustic Emission Monitoring for Ultrasonic Cavitation Based Dispersion Process,” ASME J. Manuf. Sci. Eng., 135(3), p. 031015. [CrossRef]
Sahin, O., Quate, C. F., Solgaard, O., and Atalar, A., 2004, “Resonant Harmonic Response in Tapping-Mode Atomic Force Microscopy,” Phys. Rev. B, 69(16), p. 165416. [CrossRef]
Hibbeler, R., 2003, Engineering Mechanics Dynamics (International Edition), Macmillan Publishing Company, New York.
Booij, S. M., 2003, Fluid Jet Polishing: Possibilities and Limitations of a New Fabrication Technique.
Sooraj, V., and Radhakrishnan, V., 2013, “Elastic Impact of Abrasives for Controlled Erosion in Fine Finishing of Surfaces,” ASME J. Manuf. Sci. Eng., 135(5), p. 051019. [CrossRef]
Zhao, Y., Maietta, D. M., and Chang, L., 2000, “An Asperity Microcontact Model Incorporating the Transition From Elastic Deformation to Fully Plastic Flow,” ASME J. Tribol., 122(1), pp. 86–93. [CrossRef]
Lawn, B. R., and Marshall, D., 1978, “Indentation Fracture and Strength Degradation in Ceramics,” Flaws and Testing, Springer, pp. 205–229.
Ganguly, V., Schmitz, T., Graziano, A., and Yamaguchi, H., 2013, “Force Measurement and Analysis for Magnetic Field–Assisted Finishing,” ASME J. Manuf. Sci. Eng., 135(4), p. 041016. [CrossRef]
Shipway, P., and Hutchings, I., 1994, “A Method for Optimizing the Particle Flux in Erosion Testing With a Gas-Blast Apparatus,” Wear, 174(1), pp. 169–175. [CrossRef]

Figures

Grahic Jump Location
Fig. 1

Schematic diagram of the VANILA process

Grahic Jump Location
Fig. 2

Pattern design and AFM image of nanocavity pattern machined using the VANILA process (a) on silicon substrate [5]

Grahic Jump Location
Fig. 3

Topography and cross section of the machined nanocavities on (a) silicon and (b) borosilicate glass

Grahic Jump Location
Fig. 4

Modeling framework for material removal during VANILA process

Grahic Jump Location
Fig. 5

Schematic showing machining zone in VANILA Process

Grahic Jump Location
Fig. 6

Factors affecting nanoscale material removal during VANILA process

Grahic Jump Location
Fig. 7

Experimental setup (inset: fluid cell)

Grahic Jump Location
Fig. 8

Illustration of using nanoscope software's bearing analysis function to measure volume of nanocavities machined through the VANILA process

Grahic Jump Location
Fig. 9

(a) Comparison of theoretical and experimental MRR for silicon substrate and (b) comparison of theoretical and experimental MRR for borosilicate glass substrate

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In