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Research Papers

Magnetic Field Effects on Laser Drilling

[+] Author and Article Information
Gary J. Cheng

e-mail: gjcheng@purdue.edu
School of Industrial Engineering,
Purdue University,
315 N. Grant Street,
West Lafayette, IN 47907

Sha Tao

Advanced Optowave Corporation,
Ronkonkoma, NY 11779

Benxin Wu

Department of Mechanical, Materials,
and Aerospace Engineering,
Illinois Institute of Technology,
Chicago, IL 60616

1Corresponding author.

Manuscript received April 2, 2013; final manuscript received September 24, 2013; published online November 26, 2013. Assoc. Editor: Yung Shin.

J. Manuf. Sci. Eng 135(6), 061020 (Nov 26, 2013) (5 pages) Paper No: MANU-13-1138; doi: 10.1115/1.4025745 History: Received April 02, 2013; Revised September 24, 2013

A magnetic field-assisted laser drilling process has been studied, where nanosecond laser ablation is performed under an external magnetic field. The study shows that the magnetic field-assisted laser drilling process produces deeper drilling depth and generates more confined plasma plume and relative less residual, as compared with laser drilling without magnetic field. This phenomenon has been rarely reported in the literature. The magnetic field effects on laser ablation have been analyzed analytically and a hypothesized explanation has been proposed based on the effect of the magnetic field on the plasma produced during laser ablation.

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References

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Figures

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Fig. 1

(a) Schematic diagram of the experimental setup and (b) magnetic flux density map calculated by the comsol Multi-physics code assuming the side length of the magnets is one unit length

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Fig. 2

SEM images of holes drilled by pulsed laser with and without magnetic field (pulse energy 202 mJ, 300 pulses): (a) top surface of the hole from laser drilling with magnetic field; (b) top surface of the hole from laser drilling without magnetic field; (c) cross-section image of the hole from laser drilling with magnetic field; and (d) cross-section image of the hole from laser drilling without magnetic field

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Fig. 3

Optical profilometry of the holes in copper drilled by pulsed laser (a) with and (b) without magnetic field (pulse energy: 110 mJ; water confinement, number of shots: 10 shots); (c) comparison of geometry of holes drilled with and without magnetic field, as shown in (a) and (b), respectively

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Fig. 4

Effect of magnetic field on the profiles of the surface generated by laser drilling of copper under water (a) surface of the laser drilled interior without magnetic field and (b) surface of the laser drilled interior with magnetic field

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Fig. 5

Effect of magnetic field on the profiles of the surface generated by laser drilling after glass confined laser ablation of silicon: left (without magnetic field) and right (with magnetic field)

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Fig. 6

Depth of laser drilling versus pulsed laser energy, with and w/o magnetic field (laser beam size: 0.5 mm, laser wavelength: 1064 nm, pulsed laser number: 200, material: silicon)

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Fig. 7

A schematic diagram showing the confinement effect of the magnetic field on laser-induced plasma ((b) shows that the plasma material motion in +Z direction will induce an EM force in −Z direction to constrain the motion)

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