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Research Papers

Nanoscale Surface Modifications by Magnetic Field-Assisted Finishing

[+] Author and Article Information
Raul E. Riveros

e-mail: pigup@ufl.edu

Hitomi Yamaguchi

Department of Mechanical and
Aerospace Engineering,
University of Florida,
Gainesville, FL 32611

1Corresponding author.

Manuscript received December 20, 2011; final manuscript received June 19, 2013; published online September 16, 2013. Assoc. Editor: Allen Y. Yi.

J. Manuf. Sci. Eng 135(5), 051014 (Sep 16, 2013) (7 pages) Paper No: MANU-11-1409; doi: 10.1115/1.4025190 History: Received December 20, 2011; Revised June 19, 2013

A magnetic field-assisted finishing (MAF) process has been developed to reduce the sidewall surface roughness of the 5–20 μm wide curvilinear pores of microelectromechanical systems micropore X-ray optics to <1 nm Rq. Although the feasibility of this process has been demonstrated on these optics, a clear understanding of the MAF process' material removal mechanisms has not been attained. In an attempt to discover these mechanisms, the MAF process is applied to a flat workpiece, allowing for direct observation and tracking of changes to distinctive surface features before and after MAF. Atomic force microscopy, field-emission scanning electron microscopy, and energy-dispersive X-ray spectroscopy are used to analyze the surface morphology and composition with respect to finishing time. These observations suggest that the MAF process modified the surface, reducing surface roughness (from 0.8 nm to 0.6 nm Rz on silicon) by removing relatively low-wavelength surface features. Moreover, the MAF process appears to modify the surface mechanically.

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References

Ezoe, Y., Mitsuishi, I., Takagi, U., Koshiishi, M., Mitsuda, K., Yamasaki, N., Ohashi, T., Kato, F., Sugiyama, S., Riveros, R. E., Yamaguchi, H., Fujiwara, K., Kanamori, Y., Morishita, K., and Maeda, R., 2009, “Ultra Light-Weight and High-Resolution X-ray Mirrors Using DRIE and X-ray LIGA Techniques for Space X-ray Telescopes,” Microsyst. Technol., 16(8–9), pp. 1633–1641. [CrossRef]
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Figures

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Fig. 1

Magnetic field-assisted finishing experimental setup

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Fig. 2

Schematic of the workpiece surface pattern

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Fig. 3

Images of the tracked pocket by AFM

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Fig. 4

Measured height difference between SiO2 surface and the pocket floor

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Fig. 5

Schematic of regions chosen for observation

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Fig. 6

Measured values of Rz and Rq versus finishing time

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Fig. 7

Comparison of surface profiles in the three tracked regions with finishing time

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Fig. 8

Low-magnification FE-SEM images of the workpiece surface

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Fig. 9

High-magnification FE-SEM images of the workpiece surface

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Fig. 10

Comparison of EDXS spectra

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Fig. 11

Phase contrast images of tracked regions versus finishing time

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Fig. 12

Measured values of the height difference h and the roughness Rz and Rq versus finishing time in the abrasive-less case

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