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Research Papers

A Feasibility Study of Vibration-Assisted Nano-Impact Machining by Loose Abrasives Using Atomic Force Microscope

[+] Author and Article Information
Murali M. Sundaram

e-mail: murali.sundaram@uc.edu
School of Dynamic Systems,
University of Cincinnati,
Cincinnati, OH 45221

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING. Manuscript received September 13, 2011; final manuscript received September 7, 2012; published online November 26, 2012. Assoc. Editor: Burak Ozdoganlar.

J. Manuf. Sci. Eng. 134(6), 061014 (Nov 26, 2012) (11 pages) doi:10.1115/1.4007714 History: Received September 13, 2011; Revised September 07, 2012

Nanomachining of brittle materials is required in a wide range of applications. This paper reports on the feasibility studies of vibration-assisted nano-impact machining by loose abrasives (VANILA), a novel nanomachining process for target-specific nanomachining of hard and brittle materials. A mathematical model based on Hertzian fracture mechanics theory has been developed to evaluate the feasibility of material removal in the VANILA process, where hard abrasive grains impact the brittle workpiece surface. Experimental investigations are conducted using a commercially available atomic force microscope (AFM), to validate the feasibility of the proposed process. Several nanocavities with circular shape, having depths ranging from 6 to 64 nm and diameters ranging from 78 to 276 nm, are successfully machined. Patterns of nanocavities are machined to confirm the repeatability and controllability of the process. Observation of tool tips using a scanning electron microscope (SEM) reveals that the tool wear in the VANILA process is lesser than that observed in indentation process.

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Figures

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Fig. 1

Schematic of VANILA process (a) tool striking the abrasive particle, (b) abrasive particle impacting the workpiece surface, and (c) material removal from the workpiece

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Fig. 2

Experimental setup (inset: fluid cell)

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Fig. 3

Drive amplitude versus frequency plot during cantilever tuning of VANILA process

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Fig. 4

AFM images of nanocavity machined through VANILA process (machining time 20 s)

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Fig. 5

AFM image of nanohole pattern (pattern 1) machined using VANILA process

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Fig. 6

AFM image of nanohole pattern (pattern 2) machined using VANILA process

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Fig. 7

Shift in resonance frequency of tool tip vibrating in liquid medium using direct-drive fluid cell

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Fig. 8

AFM image of inverse triangular pyramid-shaped cavities obtained when the tool tip directly indents the workpiece surface

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Fig. 9

SEM image of AFM probe tips showing tool wear

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