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Technical Briefs

Analysis and Prediction of the In-Plane Deformation in Laser Thermal Adjustment

[+] Author and Article Information
Hong Shen

School of Mechanical Engineering,  Shanghai Jiao Tong University, Shanghai 200240, China; State Key Laboratory of Mechanical System and Vibration, Shanghai 200240, Chinash_0320@sjtu.edu.cn

Jun Hu

School of Mechanical Engineering,  Shanghai Jiao Tong University,  Shanghai 200240, China

Zhenqiang Yao

School of Mechanical Engineering,  Shanghai Jiao Tong University, Shanghai 200240, China; State Key Laboratory of Mechanical System and Vibration,Shanghai 200240, China

J. Manuf. Sci. Eng 134(4), 044503 (Jun 27, 2012) (5 pages) doi:10.1115/1.4006852 History: Received September 01, 2011; Revised May 08, 2012; Published June 26, 2012; Online June 27, 2012

Laser thermal adjustment as an application of laser forming in microsystems has received considerable attentions in recent years. This process is a noncontact and high precision forming method. The traditional mechanical microforming technologies for the adjustment step used in microsystem assembly are often limited in their accuracy and are also time consuming. This paper presents an analytical model for describing the in-plane deformation of actuators during laser thermal adjustment. A formula for calculating the in-plane bending angle of the actuator generated by the laser processing is derived. The proposed analytical model is demonstrated by the comparison of the predicted bending angles with the numerical and experimental results. Finally, a formula to predict the possible buckling of the actuator during the laser processing is also developed, from which one can design the opening of the actuator in order to avoid the buckling of the actuator during a heating stage of the process.

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Copyright © 2012 by American Society of Mechanical Engineers
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Figures

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Figure 1

Laser thermal adjustment of two-bridge actuators

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Figure 2

Distributions of the strain (a), stress (b) in the section during the heating process and the strain (c), stress (d) in the section during the cooling process

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Figure 3

Experiment setup of laser thermal adjustment

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Figure 4

Variation of in-plane angle with temperature

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