The single point diamond turning process has been used extensively for direct optical surface fabrication. However, the diamond machined surfaces have characteristic periodic tool marks, which contribute to reduced optical performance such as scattering and distortion. In this paper, studies of the characteristics of diamond machined surface and scattering from the diamond machined surfaces are presented. Four different parameters, the first order optical diffraction, the zero order reflection, the surface roughness, and the residual tool mark depth, are used as indicators for the machined surface quality. Four sets of tests are presented showing the relationship between machined surface quality and machining conditions such as spindle speed, feedrate, and machining process. Finally, an empirical model is given based on the measurements.