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Research Papers

The Effect of Laser Pulse Duration and Feed Rate on Pulsed Laser Polishing of Microfabricated Nickel Samples

[+] Author and Article Information
Tyler L. Perry, Dirk Werschmoeller, Xiaochun Li, Frank E. Pfefferkorn, Neil A. Duffie

Department of Mechanical Engineering, University of Wisconsin-Madison, 1513 University Avenue, Madison, WI 53706

J. Manuf. Sci. Eng 131(3), 031002 (Apr 15, 2009) (7 pages) doi:10.1115/1.3106033 History: Received September 18, 2008; Revised January 10, 2009; Published April 15, 2009

The objective of this work was to improve our understanding of pulsed laser micropolishing (PLμP) by studying the effects of laser pulse length and feed rate (pulses per millimeter) on surface roughness. PLμP experiments were conducted with a multimode neodymium-doped yttrium aluminum garnet (Nd:YAG) laser (1064 nm wavelength) that was focused down to approximately 50μm diameter and scanned over the stationary workpiece surface. Simulation results presented here and previous work suggest that longer laser pulses result in smoother surfaces. Results on microfabricated nickel samples using laser pulse durations of 300 ns and 650 ns test this hypothesis. Polishing with 300 ns and 650 ns pulse durations results in an average surface roughness of 66 nm and 47 nm, respectively; reductions of 30% and 50% compared with the original surface. Furthermore, PLμP is shown to introduce a minor artifact on the sample surface whose spatial frequency (1/mm) is directly related to the laser feed rate (pulses/mm).

Copyright © 2009 by American Society of Mechanical Engineers
Topics: Nickel , Lasers , Polishing
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References

Figures

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Figure 1

Experimental setup of laser and scanhead

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Figure 2

Microscope image at 20× showing the effect of a single laser pulse on the 300 μm thick paper used to evaluate the laser spot size

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Figure 3

Relationship of spot area with respect to the z position. The line is the best fit parabola.

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Figure 4

Laser fluence window for nickel

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Figure 5

Representation of a surface with Fourier components

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Figure 6

3D interferometer image showing a nickel sample with 15 μm line features

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Figure 7

The effect of 300 ns laser pulses of varying fluences on normalized Ra of the nickel sample

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Figure 8

Interferometer intensity map showing a nickel surface polished using 300 ns laser pulses at a fluence of 0.86 J/cm2

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Figure 9

Interferometer 3D model showing a nickel surface polished using 300 ns laser pulses at a fluence of 0.86 J/cm2

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Figure 10

Line profiles of the unpolished (gray) and polished (black) nickel surface using 300 ns laser pulses at a fluence of 0.86 J/cm2

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Figure 11

Spatial frequency plot of unpolished (gray) and polished (black) nickel surfaces using 300 ns laser pulses at a fluence of 0.86 J/cm2

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Figure 12

The effect of 650 ns laser pulses of varying fluences on normalized Ra of the nickel sample

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Figure 13

Interferometer intensity map showing a nickel surface polished using 650 ns laser pulses at a fluence of 2.99 J/cm2

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Figure 14

Interferometer 3D model showing a nickel surface polished using 300 ns laser pulses at a fluence of 2.99 J/cm2

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Figure 15

Line profiles of the unpolished (gray) and polished (black) nickel surfaces using 650 ns laser pulses at a fluence of 2.99 J/cm2

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Figure 16

Spatial frequency plot of unpolished (gray) and polished (black) nickel surfaces using 650 ns laser pulses at a fluence of 2.99 J/cm2

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Figure 17

Interferometer intensity map showing a nickel surface polished using 650 ns laser pulses with 60 pulses/mm

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Figure 18

Line profiles of the unpolished (gray) and polished (black) nickel surfaces using 650 ns laser pulses with 60 pulses/mm

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Figure 19

Spatial frequency plot of the unpolished (gray) and polished (black) nickel surfaces using 650 ns laser pulses with 60 pulses/mm

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Figure 20

Spatial frequency plot of the unpolished (gray) and polished (black) nickel surfaces using 650 ns laser pulses with 80 pulses/mm

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Figure 21

Spatial frequency plot of the unpolished (gray) and polished (black) nickel surfaces using 650 ns laser pulses with 50 pulses/mm

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