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SPECIAL ISSUE ON NANOMANUFACTURING

Construction and Analysis of Nanoscale Simulative Measuring Model for Scanning Near-Field Optical Microscope

[+] Author and Article Information
Zone-Ching Lin1

Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43 Sec. 4 Keelung Road, Taipei, 106 Taiwan, R.O.C.zclin@mail.ntust.edu.tw

Ming-Ho Chou

Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43 Sec. 4 Keelung Road, Taipei, 106 Taiwan, R.O.C.

1

Corresponding author.

J. Manuf. Sci. Eng 132(3), 030910 (May 28, 2010) (8 pages) doi:10.1115/1.4001685 History: Received August 13, 2009; Revised April 12, 2010; Published May 28, 2010; Online May 28, 2010

This study constructs a novel scanning near-field optical microscope (SNOM) fixed-amplitude simulative measuring model. It uses Al, Si, and O atoms to compose the probe tip and sample to construct the atomic model of SNOM simulative measuring model. It also applies Morse potential to calculate the atomic interaction force between tip and sample on the vibration theory of SNOM. This study compares the edge effect of surface profile between the simulated measurement with experimental measurement; it verifies that the nanoscale simulative measuring model for SNOM is reasonable and accurate. After analyzing the edge effect and error about the surface profile of standard sample by the SNOM simulated measurement, it is found that the factor influencing this surface profile appearance is mainly from the tip shapes. The investigation of the error analysis is referential in compensating the error of SNOM measurement and it can be used to further enhance the accuracy of SNOM measurement.

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Copyright © 2010 by American Society of Mechanical Engineers
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Figures

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Figure 1

TGZ01 standard sample

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Figure 2

Geometrical shape of SNOM optical fiber probe tip

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Figure 3

Atomic model of the simulative measuring model for SNOM

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Figure 4

SEM image of SNOM1640-00 model optical fiber probe tip

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Figure 5

Surface profile from the AURORA-3 SNOM machine

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Figure 6

Measurement and simulated results of surface profile

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Figure 7

The aperture and the bulging height of the tip

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Figure 8

The bevel angle and the thickness of Al-coated silica optical fiber tip

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Figure 9

Simulated results of surface profile with different apertures

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Figure 10

Simulated results of surface profile with different slopes

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