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SPECIAL ISSUE ON NANOMANUFACTURING

Study of a High Performance AFM Probe-Based Microscribing Process

[+] Author and Article Information
Keith Bourne, Shiv G. Kapoor, Richard E. DeVor

Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801

J. Manuf. Sci. Eng 132(3), 030906 (May 26, 2010) (10 pages) doi:10.1115/1.4001414 History: Received February 18, 2009; Revised January 21, 2010; Published May 26, 2010; Online May 26, 2010

In this paper, a mechanical microscribing process is described that combines AFM probe-based microscribing with a five-axis microscale machine tool motion platform in order to achieve high scribing speeds, a large working volume, and the capability of cutting curvilinear patterns of grooves. An experiment is described that demonstrates groove formation, groove shape, and tool wear when long grooves are formed using multiple tool passes. A second more systematic experiment is described in which short-distance single-pass cutting tests were used to explore the effects of cutting speed, nominal tool load, and AFM probe mounting angle on groove geometry, tool wear, effective rake angle, and chip formation. Lastly, an experiment is described in which a long curvilinear groove is cut. It is shown that the most well-formed grooves were cut and acceptable tool wear was achieved, when using a high cutting speed, high nominal tool load, and low probe mounting angle. The capability of cutting grooves as long at 82 mm but with depths of only a few hundred nanometers, using a single tool pass at cutting speeds as high at 25 mm/min is demonstrated.

Copyright © 2010 by American Society of Mechanical Engineers
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References

Figures

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Figure 1

Schematic of scribing assembly

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Figure 2

DT-NCHR diamond-coated AFM tip

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Figure 3

Mounting angle and cantilever bending effect at low (a) and high (b) applied loads, where (Fn2>Fn1)

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Figure 4

First and second grooves from test 1B

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Figure 5

Tool wear measurement

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Figure 6

New and worn AFM probes

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Figure 7

Shapes of first and tenth grooves from test 1B

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Figure 8

Chips seen in experiment 1: (a) ribbon, (b) washer-type helical, and (c) tubular chips

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Figure 9

Interactions affecting wear

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Figure 10

Interactions affecting wear radius

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Figure 11

AFM images of selected experiment 2 grooves

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Figure 12

Three-factor interaction affecting groove depth

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Figure 13

Three-factor interaction affecting burr height

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Figure 14

New (left) and worn (right) AFM tips in cutting orientation with rake faces on the left side

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Figure 15

Calculation of effective average rake angle

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Figure 16

Example chips from test 2A and test 2H

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Figure 17

SEM images of a groove cut in a spiral pattern

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Figure 18

AFM image of a spiral-shaped groove section

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Figure 19

Groove depth and width versus distance cut

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