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Special Section: Micromanufacturing

An Acoustic Emission-Based Method for Determining Contact Between a Tool and Workpiece at the Microscale

[+] Author and Article Information
Keith A. Bourne

Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801kbourne2@uiuc.edu

Martin B. Jun

Department of Mechanical Engineering, University of Victoria, Victoria, BC, Canadambgjun@uvic.ca

Shiv G. Kapoor

Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801sgkapoor@uiuc.edu

Richard E. DeVor

Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801redevor@uiuc.edu

J. Manuf. Sci. Eng 130(3), 031101 (May 05, 2008) (8 pages) doi:10.1115/1.2917285 History: Received July 27, 2006; Revised January 17, 2008; Published May 05, 2008

An acoustic emission-based touch-off detection system has been developed to determine contact between a rotating microtool and a workpiece surface with micron-level accuracy. The system has been implemented on an existing three-axis microscale machine tool. The system has been tested with microendmills as small as 50μm in diameter and microdrills as small as 254μm in diameter. The accuracy of the system has been found to depend on tool geometry and workpiece surface characteristics and is generally on the order of 1μm. An analytical model has been constructed to predict touch-off detection error. The calibrated model has been shown to predict surface overshoot and undershoot trends quite well. Simulations have shown that touch-off error is dominated by part surface roughness.

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Copyright © 2008 by American Society of Mechanical Engineers
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References

Figures

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Figure 1

AE Bursts from microendmill-workpiece contact

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Figure 2

Touch-off between an inclined workpiece and a (a) microendmill and a (b) microdrill

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Figure 3

Tool-workpiece contact points using multipoint touch-off algorithm

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Figure 4

UIUC three-axis mMT and machine coordinate system

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Figure 5

(Left) Nano30 AE sensor (right) sensor-workpiece mount

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Figure 6

Micromilling machine z-stage overshoot

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Figure 7

Effect of detection threshold and wear on touch-off overshoot∕undershoot with a 50.8μm diameter endmill

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Figure 13

Effect of detection threshold, varying surface roughness, and tool diameter on predicted undershoot

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Figure 8

4μm deep feature cut into aluminum with a 50.8μm diameter endmill

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Figure 9

Tool marks due to touch-off: (a) endmill diameter=254μm, Ra=0.05μm; (b) endmill diameter=254μm, Ra=0.2μm; (c) endmill diameter=254μm, Ra=0.38μm; (d) drill diameter=508μm, Ra=0.38μm

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Figure 10

Microendmill touch-off model

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Figure 11

Model calibration for aluminum

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Figure 12

AE burst magnitude trend from touch-off against a surface with 0.42μmRa

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