The potentials of semi-solid forming technology have generated much interest regarding its application in micromanufacturing. This study investigates the feasibility of using semi-solid forming technology to produce parts with micro/meso features. An experimental setup has been developed to study the effects of die/punch temperature, initial solid fraction, punch speed, and workpiece shape on the semi-solid forming process. A part has been produced for a microreactor application and has been analyzed with an optical measurement system for feature formation. The results indicated complex interaction among the process parameters and the material flow, which affected the final pin formation. The punch temperature and velocity had a significant effect on the overall die filling. The initial workpiece shape and solidification of the semi-solid material during forming influenced the micro/meso-feature formation sequence, affecting the final pin formation. Furthermore, grain deformation and distribution of the formed parts were investigated. The grains became larger due to induction heating and the forming process. Severely distorted grains were observed at the corner regions of the pins and the punch-workpiece interface.