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TECHNICAL PAPERS

Laser Interferometry Hologram Registration for Three-Dimensional Precision Measurements

[+] Author and Article Information
Zhenhua Huang, Albert J. Shih, Jun Ni

Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109

J. Manuf. Sci. Eng 128(4), 1006-1013 (Mar 07, 2006) (8 pages) doi:10.1115/1.2335856 History: Received December 27, 2005; Revised March 07, 2006

A hologram registration method is developed for the laser holographic interferometry measurement of the 3D surface profile of objects which are larger than the field of view (FOV). The theory of laser holographic interferometry, including the phase-shifting and multiwavelength tuning, is described. The hologram registration without using targets is elaborated. The cross-correlation analysis is used to find the translation and overlapped regions, which determine the tilt and shift correction for data registration. The proposed method is validated using two examples with different approaches. The first example, a wheel hub, is smaller than the FOV and demonstrates only 0.1μm discrepancy of the surface flatness between the registered and standard measurements. The second example, an engine combustion deck surface, is larger than the FOV. The registered surface measurements are compared to that of coordinate measurement machine (CMM) with only 2.5% discrepancy of the peak-to-valley flatness. This data registration method enables the sub-μm precision and large depth of field (several centimeters) measurement of large size objects.

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Copyright © 2006 by American Society of Mechanical Engineers
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Figures

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Figure 1

Diagram of the laser holographic interferometer: (a) configuration of the machine and (b) scheme of the optical measurement unit in (a)

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Figure 2

Measurement regions and variables used for hologram registration: (a) measurement A and (b) measurement B. In this research, W=1024, p=0.293mm, pW=300mm.

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Figure 3

Wheel hub: (a) isometric view, (b) top view, and (c) close-up view of the dent marked in the solid rectangle in (b)

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Figure 4

Measured holograms of the wheel hub: (a) intensity and (b) phase of measurements A and B

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Figure 5

Correlation matrix C of measurements A and B of the wheel hub

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Figure 6

Registered hologram of the wheel hub: (a) phase and (b) intensity

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Figure 7

3D profile measurement of the wheel hub: (a) registered measurement hm(i,j) and (b) standard measurement hs(i,j)

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Figure 8

Difference between hs(i,j) and hm(i,j) of the wheel hub

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Figure 9

Effect of the area of the overlapped region on the error erms

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Figure 10

Overview of a V6 engine head combustion deck surface

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Figure 11

3D profile of the engine head combustion deck surface: (a) registered measurement and (b) CMM measurement

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