Machining a Micro/Meso Scale Structure Using a Minaturized Machine Tool by Using a Conventional Cutting Process

[+] Author and Article Information
J. H. Lee, S. R. Park

School of Mechanical Engineering, Kyungpook National University, Daegu 702-701, Republic of Korea

S. H. Yang1

School of Mechanical Engineering, Kyungpook National University, Daegu 702-701, Republic of Koreasyang@knu.ac.kr


Corresponding author.

J. Manuf. Sci. Eng 128(3), 820-825 (Feb 13, 2006) (6 pages) doi:10.1115/1.2194062 History: Received February 13, 2004; Revised February 13, 2006

Micro/meso scale parts, connectors, and couplers in optic communication and arbitrary 3D features are required in various fields of industry. In this paper, a miniaturized machine tool is developed to machine arbitrary 3D features in the micro/meso scale based on CNC and PC-NC technology. In the proposed system, a PI controller with antiwindup capability is adopted which helps micro/meso scale machining of components. For performance evaluation, a V groove and a 3D feature are machined using the proposed miniaturized machine tool.

Copyright © 2006 by American Society of Mechanical Engineers
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Figure 1

Three-axis positioning system using miniaturized stages. (a) Miniaturized machine tool for milling; (b) Miniaturized machine tool for fabricating a V groove.

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Figure 2

Structure of stage

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Figure 3

Block diagram of overall system

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Figure 4

PI controller with antiwindup

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Figure 5

Micro step response

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Figure 6

Numerical control kernel (NCK) flowchart

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Figure 7

Communication between PC and DSP

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Figure 8

SEM photo of diamond tip

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Figure 9

Procedure of machining using a diamond tip

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Figure 10

Front view of machined grooves (at 0.67mm∕s, 2μm)

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Figure 11

Front and side view of a 200μm flat end mill

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Figure 12

Tool path generated by commercial CAD/CAM software

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Figure 13

Profile captured on the cutting process; x axis is time (ms) and y axis is position (μm)

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Figure 14

Machined part of the 3D feature

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Figure 15

Closer observation of the machined surface



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