A trigger probe measurement system and measurement methodology are developed for kinematic self-calibration of micro/meso-scale machine tools (mMTs). The trigger probe detects the contact between a spindle-mounted stylus and a table-mounted planar artifact. The trigger probe system is small enough to be easily mounted on an mMT. The measurement methodology is divided into off-machine and on-machine measurements. The off-machine measurements are only needed for the first calibration. Recalibration requires only the on-machine measurements to be repeated, thereby reducing recalibration time. The measurement system and methodology are implemented with existing kinematic modeling, error parameter estimation, and compensation techniques for the experimental calibration of a three-axis mMT. The measurement system error is evaluated and experimentally measured. Cutting tests are used to validate the performance of the calibration methodology.