0
TECHNICAL PAPERS

Volumetric Error Compensation of Multi-Axis Laser Machining Center for Direct Patterning of Flat Panel Display

[+] Author and Article Information
Sang Y. Jin

Department of Mechanical and Industrial Engineering, University of Illinois at Chicago, Chicago, IL 60612sayojin@gmail.com

Ki-Taek Lee

Department of Mechanical and Industrial Engineering, Marquette University, Milwaukee, WI 53201ki-taek.lee@Marquette.edu

Kyuil Kim

Department of Mechanical and Industrial Engineering, Marquette University, Milwaukee, WI 53201kyle.kim@Marquette.edu

J. Manuf. Sci. Eng 128(1), 239-248 (Apr 07, 2005) (10 pages) doi:10.1115/1.2118787 History: Received December 01, 2004; Revised April 07, 2005

A new direct laser patterning system for improving the quality of the pattern on the glass substrate of large Flat Panel Displays (FPD) was developed, which consists of the laser machining center, the laser measurement system, and the adaptive rotational mirror system. The new system is distinguished from the existing system by its control mechanism which compensates for the laser beam error caused by the volumetric error of the multi-axis machine. The new system, in comparison with existing systems which control each stage of multi-axis, uses a fast steering mirror (FSM) and adaptive laser optics to compensate for the error of the laser beam on the substrate. Through this study, a mathematical model of the volumetric error of the multi-axis laser machining center was developed to quantify the geometric and the kinematic errors of each machine axis and their contributing effect on the substrate. The information contained in the mathematical model was expressed in a volumetric error matrix. Further, a mathematical model of the beam delivery was developed to measure the beam delivery on the substrate and its effect on the quality of the patterning. The patterning errors were corrected by using an FSM, which has two rotational angles. The viability of the proposed scheme was demonstrated through simulations and experiments.

FIGURES IN THIS ARTICLE
<>
Copyright © 2006 by American Society of Mechanical Engineers
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Figure 1

Configuration of the multi-axis machining center for direct patterning

Grahic Jump Location
Figure 6

Rotational mirror adjustment

Grahic Jump Location
Figure 7

Rotational mirror in rectangular coordinates

Grahic Jump Location
Figure 8

Experimental setup

Grahic Jump Location
Figure 9

The positioning error, the pitch, and the yaw components of the first linear stage

Grahic Jump Location
Figure 10

The positioning error, the pitch, and the yaw components of the second linear stage

Grahic Jump Location
Figure 11

Typical ITO pattern

Grahic Jump Location
Figure 12

Patterns observed at 9 points, before compensation

Grahic Jump Location
Figure 13

Patterns observed at 9 points, after compensation by the FSM

Grahic Jump Location
Figure 2

Detailed schematic diagram of focusing lens, beamsplitter, and PSD

Grahic Jump Location
Figure 3

The position and direction vectors of flat mirrors

Grahic Jump Location
Figure 4

Optical schematic of a beam delivery system

Grahic Jump Location
Figure 5

The scheme of the rotational mirror system

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In