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TECHNICAL PAPERS

Nanometer-Level Comparison of Three Spindle Error Motion Separation Techniques

[+] Author and Article Information
Eric Marsh1

 Pennsylvania State University, 21 Reber Building, University Park, PA 16802emarsh@psu.edu

Jeremiah Couey

 Pennsylvania State University, 21 Reber Building, University Park, PA 16802

Ryan Vallance

 George Washington University, 738 Phillips Hall, 802 22nd Street N.W., Washington, D.C. 20052

1

Author to whom correspondence should be addressed.

J. Manuf. Sci. Eng. 128(1), 180-187 (Apr 21, 2005) (8 pages) doi:10.1115/1.2118747 History: Received December 19, 2004; Revised April 21, 2005

This work demonstrates the state of the art capabilities of three error separation techniques for nanometer-level measurement of precision spindles and rotationally-symmetric artifacts. Donaldson reversal is compared to a multi-probe and a multi-step technique using a series of measurements carried out on a precision aerostatic spindle with a lapped spherical artifact. The results indicate that subnanometer features in both spindle error motion and artifact form are reliably resolved by all three techniques. Furthermore, the numerical error values agree to better than one nanometer. The paper discusses several issues that must be considered when planning spindle or artifact measurements at the nanometer level.

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Copyright © 2006 by American Society of Mechanical Engineers
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Figures

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Figure 1

Separation of spindle error motion and artifact form error from displacement measurement data

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Figure 2

Schematic of the three-probe error separation method (after Mitsui (20))

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Figure 3

Schematic of the multi-step error separation method after B89.3.4M (8)

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Figure 4

Schematic of the Donaldson reversal method

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Figure 5

Schematic of the modified Donaldson reversal method using a precision rotary table and a reversal chuck

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Figure 6

Spindle test assembly with a spherical master artifact

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Figure 7

Measurement repeatability without reversal for 10 tests

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Figure 8

Synchronous spindle error motion (by modified Donaldson reversal) for 10 tests

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Figure 9

Error separation results and the discrepancies of multi-step and multi-probe with modified Donaldson reversal (data low-pass filtered to 15cpr)

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Figure 10

Error separation results and the discrepancies of multi-step and multi-probe with modified Donaldson reversal (data low-pass filtered to 100cpr)

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Figure 11

Frequency components of the three error separation methods

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