Development of NiCrNiSi Thin-Film Thermocouple Sensor for Workpiece Temperature Measurement in Chemical Explosive Material Machining

[+] Author and Article Information
Qiyong Zeng

College of Mechatronical Engineering, China Jiliang University, Hangzhou 310018, People's Republic of China

Baoyuan Sun, Jing Xu, Ying Jia

Institute of Sensing & Control, School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, People’s Republic of China

Xinlu Deng, Jun Xu

State Key Laboratory for Material Modification by Electron, Ion and Laser Beam, Department of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China

J. Manuf. Sci. Eng 128(1), 175-179 (Jun 02, 2005) (5 pages) doi:10.1115/1.2117467 History: Received September 22, 2004; Revised June 02, 2005

Temperature plays a vital role in the machining industry today. With increasing cutting speeds being used in machining operations, the thermal aspects of cutting have become more important. A nickel-chrome versus nickel-silicon thin-film thermocouple system has been established for measuring instantaneous workpiece temperature in chemical explosive material machining. The thin-film thermocouples have been directly deposited inside high-speed steel cutters by means of multiple arc ion plating and the thickness of the thermocouple junction is only a few micrometers. The research effort has been concentrated on developing solutions to the insulating problem between the thin-film thermocouples and the high-speed steel cutters. SiO2 insulating films have been deposited on the high-speed steel substrates by microwave electron cyclotron resonance plasma source enhanced radiofrequency (rf) reactive magnetron sputtering. Static and dynamic calibrations of the NiCrNiSi thin-film thermocouples are presented. The results of the testing indicate that the thin-film thermocouples have good linearity, little response time, and perform excellently when machining in situ.

Copyright © 2006 by American Society of Mechanical Engineers
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Figure 1

Sketch map of the structure of the temperature measuring cutter

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Figure 2

Schematic of the deposition system

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Figure 3

Relative position of ECR coil, target, and substrate holder (a) and the axial distribution of B (b)

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Figure 4

NiCr∕NiSi thin-film thermocouples applied in a HSS cutter (c). Lower part of the cutter (a). Upper part of the cutter (b).

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Figure 5

Schematic of the test fixture and chamber for the calibration of the test thermocouple

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Figure 6

The relationship between the temperature of the hot junction and the TFTC electromotive force. After calculating by the minimal square method, the Seebeck coefficient of the TFTC is 20.9μV∕°C, which deviates significantly from that of NiCr∕NiSi wire thermocouple. But the TFTC has good linearity throughout the whole temperature range.

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Figure 7

Scanning electron micrograph of NiCr film

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Figure 8

Experimental NiCr∕NiSi TFTC step responses

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Figure 9

Effects of cutting speed v, cutting depth ap, and feed rate f on workpiece temperature




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