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TECHNICAL PAPERS

Development of a Six-Degree-of-Freedom Geometric Error Measurement System for a Meso-Scale Machine Tool

[+] Author and Article Information
Sang Won Lee1

S. M. Wu Manufacturing Research Center, University of Michigan, Ann Arbor, MI 48109sangwonl@umich.edu

Rhett Mayor

 Powerix Technologies, Ann Arbor, MI 48105

Jun Ni

S. M. Wu Manufacturing Research Center, University of Michigan, Ann Arbor, MI 48109

1

To whom correspondence should be addressed.

J. Manuf. Sci. Eng 127(4), 857-865 (Mar 11, 2005) (9 pages) doi:10.1115/1.2035692 History: Received November 18, 2004; Revised March 11, 2005

This paper presents the development of a six-degree-of-freedom (DOF) geometric error measurement (6GEM) system that can be applied to the simultaneous measurement of six geometric error components of the moving axes of a meso-scale machine tool (mMT). The system consists of a laser module constructed by a cube beam splitter and a pigtailed laser diode, three two-dimensional position sensitive detectors (PSDs), and an additional cube beam splitter. The laser module moving with the positioning system of the developed mMT testbed generates two perpendicular laser beams, one of which is further divided into two laser beams at the second cube beam splitter. These three laser beams are detected by the three PSDs, and the full pose of the laser module is then calculated simultaneously by forward and inverse kinematic computations. The calculated full pose of the laser module is translated into six-DOF geometric errors of the mMT testbed. A series of experiments are performed to demonstrate the effectiveness and accuracy of the proposed 6GEM system. The experimental results show that the measurement accuracy of the 6GEM system was better than ±0.6μm for translational error components and ±0.6arcsec for angular error components.

Copyright © 2005 by American Society of Mechanical Engineers
Topics: Lasers , Errors
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References

Figures

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Figure 1

Configuration of the 6GEM system and associated coordinate frames

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Figure 2

Sensitivities of PSDs according to six-DOF motions of the laser module

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Figure 3

Schematics of parts of the 6GEM system

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Figure 4

Flowchart of inverse kinematic computation

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Figure 5

PSD readouts for 30 minutes

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Figure 6

Photos of the mMT testbed

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Figure 7

Photos of the 6GEM system

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Figure 8

Differences of positioning errors between from HP5528A and from Renishaw ML10 systems

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Figure 9

Measurements of positioning errors δyy

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Figure 10

Measurement differences of positioning errors δyy

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Figure 11

Measurements of horizontal straightness errors δyx

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Figure 12

Measurements of vertical straightness errors δyz

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Figure 13

Measurement differences of horizontal straightness errors δyx

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Figure 14

Measurement differences of vertical straightness errors δyz

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Figure 15

Measurements of artificially created horizontal straightness errors

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Figure 16

Measurement differences of artificially created horizontal straightness errors

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Figure 17

Differences of pitch errors between from HP5528A and from Renishaw ML10 systems

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Figure 18

Differences of yaw errors between from HP5528A and from Renishaw ML10 systems

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Figure 19

Measurements of pitch errors εyx

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Figure 20

Measurements of yaw errors εyz

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Figure 21

Measurement differences of pitch errors εyx

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Figure 22

Measurement differences of yaw errors εyz

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Figure 23

Measurements of roll errors εyy

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