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TECHNICAL PAPERS

On-the-Fly Substrate Eccentricity Recognition for Robotized Manufacturing Systems

[+] Author and Article Information
Martin Hosek, Jan Prochazka

Brooks Automation, Inc., 15 Elizabeth Dr., Chelmsford, MA 01824, U.S.A.

J. Manuf. Sci. Eng 127(1), 206-216 (Mar 21, 2005) (11 pages) doi:10.1115/1.1830491 History: Received December 17, 2002; Revised February 07, 2004; Online March 21, 2005
Copyright © 2005 by ASME
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References

Figures

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Typical configuration of system with on-the-fly substrate eccentricity recognition
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Compensation for sensor delays, [xi,yi]=actual position of end-effector, [x̃i,ỹi]=captured position of end-effector
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Calculation of point detected by right sensor on leading edge of substrate, 0=substrate center, P3=point detected on substrate edge, R=reference point on robot end-effector, S=right sensor
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Unresolvable situation with sensors located (a) symmetrically, (b) asymmetrically
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Compensation for substrate eccentricity, 0=substrate center, R=reference point on robot end-effector, STN=robot station
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Flow chart for substrate centering process integrated with place operation
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(a) Reading errors (resolution) in x,y-directions, (b) Eccentricity error due to x,y-reading errors
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Total eccentricity error vs. sensor asymmetry for selected sensor distances
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Calculation of Cartesian coordinates of right sensor, 0=substrate center, R=reference point on robot end-effector, S=right sensor

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