Effects of Spherical Targets on Capacitive Displacement Measurements

[+] Author and Article Information
R. Ryan Vallance

Precision Systems Laboratory, The George Washington University, 738 Phillips Hall, 801 22nd St., N.W., Washington, DC 20052

Eric R. Marsh

Machine Dynamics Research Laboratory, The Pennsylvania State University, 21 Reber Building, University Park, PA 16802

Philip T. Smith

Mechanical Engineering, University of Kentucky, 015 Ralph G. Anderson Building, Lexington, KY 40506

J. Manuf. Sci. Eng 126(4), 822-829 (Feb 04, 2005) (8 pages) doi:10.1115/1.1813476 History: Received January 13, 2004; Revised April 02, 2004; Online February 04, 2005
Copyright © 2004 by ASME
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Representative capacitive displacement sensor (Lion Precision C1-C)
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Axisymmetric electrodes in representative sensor and spherical target
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Finite element analysis procedure
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Electric potential (0–9 V) within air gap and epoxy in vicinity of electrodes
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Electric field in vicinity of sensing electrode
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Lumped capacitances between conductive electrodes
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Inverse capacitance for low sensitivity (−0.394 V/μm) as a function of the gap and target diameter
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Inverse capacitance for high sensitivity (−1.694 V/μm) as a function of the gap and target diameter
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Voltage as a function of the change in gap for each spherical target and low sensitivity (predicted by FEA)
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Voltage as a function of the change in gap for each spherical target and high sensitivity (predicted by FEA)
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Fixture used to compare the output of sensors targeting spherical and flat surfaces. The sensors are stationary while the target surfaces move using the cross axis of the measuring machine.
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Comparison of experimental sensor output for different target diamenters (a) for −0.3937 V/μm and (b) for −1.969 V/μm
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Residual nonlinearity in experimental sensor output (a) −0.3937 V/μm and (b) for −1.969 V/μm



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