0
TECHNICAL PAPERS

Scanning Grating Microinterferometer for MEMS Metrology

[+] Author and Article Information
Byungki Kim, Michael C. Schmittdiel, F. Levent Degertekin, Thomas R. Kurfess

The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405

J. Manuf. Sci. Eng 126(4), 807-812 (Feb 04, 2005) (6 pages) doi:10.1115/1.1812773 History: Received February 04, 2004; Revised August 22, 2004; Online February 04, 2005
Copyright © 2004 by ASME
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Schematic of a μSGI array
Grahic Jump Location
Schematics showing that the diffraction pattern depends on distance to reflecting surface
Grahic Jump Location
Distribution of the diffracted light on an observation plane
Grahic Jump Location
The variation of the intensity of the zero and first diffraction order with distance d on an observation plane
Grahic Jump Location
SEM of the fabricated microlens
Grahic Jump Location
Schematic of scanning experimental setup
Grahic Jump Location
Optical microscopy image of a cMUT showing membrane diameter and trace width
Grahic Jump Location
Static profile of a cMUT using a Veeco white light interferometer
Grahic Jump Location
Average reflectivity image of a cMUT
Grahic Jump Location
(a) Measured amplitude of the first vibration mode. (b) A cross section of the vibration map (c) Numerical model prediction of the first vibration mode.
Grahic Jump Location
(a) Measured amplitude of the second vibration mode. (b) A cross section of the vibration map (c) Numerical model prediction of the second vibration mode.
Grahic Jump Location
Schematic diagram of the μSGI with integrated deformable grating

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In