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TECHNICAL PAPERS

Scanning Grating Microinterferometer for MEMS Metrology

[+] Author and Article Information
Byungki Kim, Michael C. Schmittdiel, F. Levent Degertekin, Thomas R. Kurfess

The George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405

J. Manuf. Sci. Eng 126(4), 807-812 (Feb 04, 2005) (6 pages) doi:10.1115/1.1812773 History: Received February 04, 2004; Revised August 22, 2004; Online February 04, 2005
Copyright © 2004 by ASME
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References

Panetta, K., Aluru, N., Bart, S., Blanton, S., Böhringer, K., and Brown, R., 2000, “ITC 2000 Panel Discussion: Testing Challenges for MEMS,” Proceedings of ITC International Test Conference, pp. 1130–1135.
S. D. Senturia, 2002, Microsystem Design, Kluwer Academic Publishers, Norwell.
Grace, R., 2003, “Commercialization issues of MEMS/MST/Micromachines: An Updated Industry Report Card on the Barriers to Commercialization,” NSF Nanotechnology Manufacturing Workshop.
Teague,  E. C., Scire,  F. E., Baker,  S. M., and Jensen,  S. W., 1982, “Three-Dimensional Stylus Profilometry,” Wear, 83, pp. 1–12.
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Hill,  M., O’Mahony,  C., Berney,  H., Hughes,  P. J., Hynes,  E., and Lane,  W. A., 2001, “Verification of 2-D MEMS Model Using Optical Profiling Techniques,” Opt. Lasers Eng., 36, pp. 169–183.
Hart,  M. R., Conant,  R. A., Lau,  K. Y., and Muller,  R. S., 2000, “Stroboscopic Interferometer System for Dynamic MEMS Characterization,” J. Microelectromech. Syst., 9, pp. 409–418.
Rembe,  C., and Muller,  R. S., 2002, “Measurement System for Full Three-Dimensional Motion Characterization of MEMS,” J. Microelectromech. Syst., 11(5), pp. 479–488.
Novak, E., Wan, D., Unruh, P., and Schmit, J., 2003, “Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information,” Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, pp. 104-107.
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www.veeco.com
www.polytec.com
Graebner,  J. E., Barber,  B., Gammel,  P. L., Greywall,  D. S., and Gopani,  S., 2001, “Dynamic Visualization of Subangstrom High-Frequency Surface Vibrations,” Appl. Phys. Lett., 78, pp. 159–161.
Kim, B., Razavi, H. A., Degertekin, F. L., and Kurfess, T. R., 2002, “Microinterferometer for Noncontact Inspection of MEMS,” The 3rd International Workshop on Microfactories, pp. 77–80.
Kim, B., Razavi, H. A., Degertekin, F. L., and Kurfess, T. R., 2002, “Micromachined Interferometer for Measuring Dynamic Response of Microstructures,” Proceedings of ASME International Mechanical Engineering Congress and Exposition, MEMS Symposium.
Kim, B., Razavi, H. A., Degertekin, F. L., and Kurfess, T. R., 2003, “Micromachined Interferometer for MEMS Metrology,” Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, pp. 73–78.
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Schmittdiel, M. C., 2004, Master’s thesis, Georgia Institute of Technology.
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Kim, B., Schmittdiel, M., Degertekin, F. L., and Kurfess, T. R., 2004, “Deformable Diffraction Grating for Scanning Micro Interferometer Arrays,” Proceedings of 2004 SPIE Symposium on MOEMS Display and Imaging Systems, 5348 , pp. 98–107.

Figures

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Schematic of a μSGI array
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Schematics showing that the diffraction pattern depends on distance to reflecting surface
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Distribution of the diffracted light on an observation plane
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The variation of the intensity of the zero and first diffraction order with distance d on an observation plane
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SEM of the fabricated microlens
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Schematic of scanning experimental setup
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Optical microscopy image of a cMUT showing membrane diameter and trace width
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Static profile of a cMUT using a Veeco white light interferometer
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Average reflectivity image of a cMUT
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(a) Measured amplitude of the first vibration mode. (b) A cross section of the vibration map (c) Numerical model prediction of the first vibration mode.
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(a) Measured amplitude of the second vibration mode. (b) A cross section of the vibration map (c) Numerical model prediction of the second vibration mode.
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Schematic diagram of the μSGI with integrated deformable grating

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