0
TECHNICAL PAPERS

A Simulation-based Correlation of Cross-Sectional Area of the Thin Film Produced by Laser Chemical Vapor Deposition With a Moving Laser Beam

[+] Author and Article Information
Yuwen Zhang

Department of Mechanical and Aerospace Engineering, University of Missouri-Columbia, Columbia, MO 65211

J. Manuf. Sci. Eng 126(4), 796-800 (Feb 04, 2005) (5 pages) doi:10.1115/1.1813478 History: Received October 07, 2003; Revised August 02, 2004; Online February 04, 2005
Copyright © 2004 by ASME
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Physical model of Laser Chemical Vapor Deposition
Grahic Jump Location
Dimensionless cross-sectional area versus (Bi/Pe)1.35
Grahic Jump Location
Dimensionless cross-sectional area versus scanning velocity
Grahic Jump Location
Cross section (P=180 W,ub=1.2 mm/s,r0=0.8 mm)
Grahic Jump Location
Cross section (P=240 W,ub=1.2 mm/s,r0=0.8 mm)
Grahic Jump Location
Cross section (P=300 W,ub=1.2 mm/s,r0=0.8 mm)
Grahic Jump Location
Cross section (P=360 W,ub=1.2 mm/s,r0=1 mm)
Grahic Jump Location
Cross section (P=240 W,ub=1.2 mm/s,r0=1 mm)
Grahic Jump Location
Cross section (P=300 W,ub=1.2 mm/s,r0=1 mm)
Grahic Jump Location
Longitudal cross section of the deposited film (P=300 W,ub=1.2 mm/s,r0=1 mm)

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In