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TECHNICAL PAPERS

A Simulation-based Correlation of Cross-Sectional Area of the Thin Film Produced by Laser Chemical Vapor Deposition With a Moving Laser Beam

[+] Author and Article Information
Yuwen Zhang

Department of Mechanical and Aerospace Engineering, University of Missouri-Columbia, Columbia, MO 65211

J. Manuf. Sci. Eng 126(4), 796-800 (Feb 04, 2005) (5 pages) doi:10.1115/1.1813478 History: Received October 07, 2003; Revised August 02, 2004; Online February 04, 2005
Copyright © 2004 by ASME
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References

Conley,  J. G., and Marcus,  H. L., 1997, “Rapid Prototyping and Solid Freeform Fabrication,” ASME J. Manuf. Sci. Eng., 119, pp. 811–816.
Marcus, H. L., Zong, G., and Subramanian, P. K., 1993, “Residual Stresses in Laser Processed Solid Freeform Fabrication,” Residual Stresses in Composite Materials: Measurement, Modeling and Effect on Thermomechanical Properties, E. V. Barrera and I. Dutta, TMS, eds., pp. 257–271.
Jakubenas, K. J., Birmingham, B., Harission, S., Croker, J., Shaarawi, M. S., Tomkins, J. V., Sanchez, J., and Marcus, H., 1997, “Recent Advances in SALD and SALDVI,” Proc. 7th International Conference on Rapid Prototyping, San Francisco, March-April, pp. 60–69.
Jakubenas,  K. J., Lee,  Y. L., Shaarawi,  M. S., Marcus,  H., and Sanchez,  J. M., 1997, “Selective Area Laser Deposition of Titanium Oxide,” Rapid Prototyping J., 3, pp. 66–70.
Harrison,  S., and Marcus,  H. L., “Gas-Phase Selective Laser Deposition (SALD) Joining of SiC,” Mater. Des., 20, pp. 147–1521999.
Mazumder, J., and Kar, A., 1995, Theory and Application of Laser Chemical Vapor Deposition, Plenum, New York.
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Jacquot, Y., Zong, G.-S., and Marcus, H. L., 1995, “Modeling of Selective Laser Deposition for Solid Freeform Fabrication,” Proc. 6th Solid Freeform Fabrication Symposium, University of Texas, Austin, pp. 74–82.
Zhang,  Y., and Faghri,  A., 2000, “Thermal Modeling of Selective Area Laser Deposition of Titanium Nitride on a Finite Slab With Stationary and Moving Laser Beams,” Int. J. Heat Mass Transfer, 43, pp. 3835–3846.
Lee, Y. L., Tompkins, J. V., Sanchez, J. M., and Marcus, H. L., 1995, “Deposition Rate of Silicon Carbide by Selected Area Laser Deposition,” Proc. 6th Solid Freeform Fabrication Symposium, University of Texas, Austin, pp. 433–439.
Zhang,  Y., 2003, “Quasi-Steady State Natural Convection in Laser Chemical Vapor Deposition With a Moving Laser Beam,” ASME J. Heat Transfer, 125, pp. 429–437.
Patankar, S. V., 1980, Numerical Heat Transfer and Fluid Flow, Hemisphere, Washington, DC.
Conde,  O., Kar,  A., and Mazumder,  J., 1992, “Laser Chemical Vapor Deposition of TiN Dot: A Comparison of Theoretical and Experimental Results,” J. Appl. Phys., 72, pp. 754–761.
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Figures

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Physical model of Laser Chemical Vapor Deposition
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Longitudal cross section of the deposited film (P=300 W,ub=1.2 mm/s,r0=1 mm)
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Cross section (P=300 W,ub=1.2 mm/s,r0=1 mm)
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Cross section (P=240 W,ub=1.2 mm/s,r0=1 mm)
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Cross section (P=360 W,ub=1.2 mm/s,r0=1 mm)
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Cross section (P=300 W,ub=1.2 mm/s,r0=0.8 mm)
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Cross section (P=240 W,ub=1.2 mm/s,r0=0.8 mm)
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Cross section (P=180 W,ub=1.2 mm/s,r0=0.8 mm)
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Dimensionless cross-sectional area versus scanning velocity
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Dimensionless cross-sectional area versus (Bi/Pe)1.35

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