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TECHNICAL PAPERS

The Mechanics of Machining at the Microscale: Assessment of the Current State of the Science

[+] Author and Article Information
X. Liu, R. E. DeVor, S. G. Kapoor

Department of Mechanical and Industrial Engineering University of Illinois at Urbana-Champaign, Urbana, IL

K. F. Ehmann

Department of Mechanical Engineering, Northwestern University, Evanston, IL

J. Manuf. Sci. Eng 126(4), 666-678 (Feb 04, 2005) (13 pages) doi:10.1115/1.1813469 History: Received August 18, 2004; Revised September 02, 2004; Online February 04, 2005
Copyright © 2004 by ASME
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References

Friedrich,  C. R., and Kang,  S. D., 1994, “Micro Heat Exchangers Fabricated by Diamond Machining,” Precision Eng., 16, pp. 56–59.
Adams,  D. P., Vasile,  M. J., and Krishnan,  A. S. M., 2000, “Microgrooving and Microthreading Tools for Fabricating Curvilinear Features,” Precision Eng., 24, pp. 347–356.
Adams,  D. P., Vasile,  M. J., Benavides,  G., and Campbell,  A. N., 2001, “Micromilling of Metal Alloys With Focused Ion Beam-Fabricated Tools,” Precision Eng., 25, pp. 107–113.
Egashira,  K., Mizutani,  K., and Nagao,  T., 2002, “Ultrasonic Vibration Drilling of Microholes in Glass,” CIRP Ann., 51, pp. 339–342.
Egashira,  K., and Mizutani,  K., 2002, “Micro-Drilling of Monocrystalline Silicon Using a Cutting Tool,” Precision Engineering, 26, pp. 263–268.
Schaller,  Th., Bohn,  L., Mayer,  J., and Schubert,  K., 1999, “Microstructure Grooves With a Width of Less Than 50 μm Cut With Ground Hard Metal Micro End Mills,” Precision Eng., 23, pp. 229–235.
Takeuchi,  Y., Sawada,  K., and Sata,  T., 1996, “Ultraprecision 3D Micromachining of Glass,” CIRP Ann., 45, pp. 401–404.
Friedrich,  C. R., and Vasile,  M. J., 1996, “Development of the Micromilling Process for High-Aspect-Ratio Microstructures,” J. Microelectromech. Syst., 5, pp. 33–38.
Shoji,  S., and Esashi,  M., 1994, “Microflow Devices and Systems,” J. Micromech. Microeng., 4, pp. 157–171.
Suzuki,  H., Ohya,  N., Kawahara,  N., Yokoi,  M., Ohyanagi,  S., Kurahashi,  T., and Hattori,  T., 1995, “Shell-Body Fabrication for Micromachines,” J. Micromech. Microeng., 5, pp. 36–40.
Tritschler,  H., Schmidt,  J., Spath,  D., Elsner,  J., and Huntrup,  V., 2002, “Requirements of an Industrially Applicable Microcutting Process for Steel Micro-Structures,” Microsys. Technol., 8, pp. 402–408.
Fang,  N., 2003, “Slip-Line Modeling of Machining With a Rounded-Edge Tool—Part II: Analysis of the Size Effect and the Shear Strain-Rate,” J. Mech. Phys. Solids, 51, pp. 743–762.
Manjunathaiah,  J., and Endres,  W. J., 2000, “A Study of Apparent Negative Rake Angle and its Effects on Shear Angle During Orthogonal Cutting With Edge-Radiused Tools.,” Trans. NAMRI/SME, 28, pp. 197–202.
Kim,  C. J., Bono,  M., and Ni,  J., 2002, “Experimental Analysis of Chip Formation in Micro-Milling,” Trans. NAMRI/SME, 30, pp. 1–8.
Yuan,  Z. J., Zhou,  M., and Dong,  S., 1996, “Effect of Diamond Tool Sharpness on Minimum Cutting Thickness and Cutting Surface Integrity in Ultraprecision Machining,” J. Mater. Process. Technol., 62, pp. 327–330.
Shimada,  S., Ikawa,  N., Tanaka,  H., Ohmori,  G., Uchikoshi,  J., and Yoshinaga,  H., 1993, “Feasibility Study on Ultimate Accuracy in Microcutting Using Molecular Dynamics Simulation,” CIRP Ann., 42, pp. 91–94.
Weule,  H., Huntrup,  V., and Tritschle,  H., 2001, “Micro-Cutting of Steel to Meet New Requirements in Miniaturization,” CIRP Ann., 50, pp. 61–64.
Vogler, M. P., DeVor, R. E., and Kapoor, S. G., 2001, “Microstructure-Level Force Prediction Model for Micro-Milling of Multi-Phase Materials,” Proc. ASME Manufacturing Engineering Division (MED-vol. 12) ASME International Mechanical Engineering Congress and Exposition, NY, pp. 3–10.
Lucca,  D. A., Rhorer,  R. L., and Komanduri,  R., 1991, “Energy Dissipation in the Ultraprecision Machining of Copper,” CIRP Ann., 40, pp. 69–72.
Lucca,  D. A., and Seo,  Y. W., 1993, “Effect of Tool Edge Geometry on Energy Dissipation in Ultraprecision Machining,” CIRP Ann., 42, pp. 83–86.
Lucca,  D. A., Seo,  Y. W., and Rhorer,  R. L., 1994, “Energy Dissipation and Tool-Workpiece Contact in Ultra-Precision Machining,” STLE Tribol. Trans., 37, pp. 651–655.
Taminiau,  D. A., and Dautzenberg,  J. H., 1991, “Bluntness of the Tool and Process Forces in High-Precision Cutting,” CIRP Ann., 40, pp. 65–68.
Ikawa,  N., Shimada,  S., Tanaka,  H., and Ohmori,  G., 1991, “Atomistic Analysis of Nanometric Chip Removal as Affected by Tool-Work Interaction in Diamond Turning,” CIRP Ann., 40, pp. 551–554.
Ikawa,  N., Donaldson,  R. R., Komanduri,  R., Koenig,  W., Aachen,  T. H., McKeown,  P. A., Moriwaki,  T., and Stowers,  I. F., 1991, “Ultraprecision Metal Cutting, The Past, the Present, and the Future,” CIRP Ann., 40, pp. 587–594.
Vogler,  M. P., DeVor,  R. E., and Kapoor,  S. G., 2004, “On the Modeling and Analysis of Machining Performance in Micro-endmilling, Part I: Surface Generation,” ASME J. Manuf. Sci. Eng., 126(4), pp. 684–693.
Damazo, B. N., Davies, M. A., Dutterer, B. S., and Kennedy, M. D., 1999, “A Summary of Micro-Milling Studies,” Proc. of 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology, Bremen, Germany, European Society of Precision Engineering, pp. 322–325.
Lee,  K., and Dornfeld,  D. A., 2002, “An Experimental Study on Burr Formation in Micro Milling Aluminum and Copper,” Trans. NAMRI/SME, 30, pp. 1–8.
Iwata,  K., Moriwaki,  T., and Okuda,  K., 1987, “A Study of Cutting Temperature in Ultra-high Precision Diamond Cutting of Copper,” Transaction of the NAMRI/SME, 15, pp. 510–515.
Moriwaki,  T., Horiuchi,  A., and Okuda,  K., 1990, “Effect of Cutting Heat on Machining Accuracy in Ultra-Precision Diamond Turning,” CIRP Ann., 39, pp. 81–84.
Tansel,  I. N., Arkan,  T. T., Bao,  W. Y., Mahendrakar,  N., Shisler,  B., Smith,  D., and McCool,  M., 2000, “Tool Wear Estimation in Micro-Machining. Part I: Tool Usage-Cutting Force Relationship,” Int. J. Mach. Tool Des. Res., 40, pp. 599–608.
Tansel,  I., Rodriguez,  O., Trujillo,  M., Paz,  E., and Li,  W., 1998, “Micro-End-Milling—I. Wear and Breakage,” Int. J. Mach. Tool Des. Res., 38, pp. 1419–1436.
Lucca,  D. A., Seo,  Y. W., Rhorer,  R. L., and Donaldson,  R. R., 1994, “Aspects of Surface Generation in Orthogonal Ultraprecision Machining,” CIRP Ann., 43, pp. 43–46.
Blake,  P. N., and Scattergood,  R. O., 1990, “Ductile-Regime Machining of Germanium and Silicon,” J. Am. Ceram. Soc., 73, pp. 949–957.
Li, D., Dong, S., Zhao, Y., and Zhou, M., 1999, “The Influence of Rake of Diamond Tool on the Machined Surface of Brittle Materials With Finite Element Analysis,” Proc. of 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology, Bremen, Germany, European Society of Precision Engineering, pp. 338–341.
Ichida, Y., 1999, “Ductile Mode Maching of Single Crystal Silicon Using a Single Point Diamond Tool,” Proc. of 1st International Conference and General Meeting of the European Society for Precision Engineering and Nanotechnology, Bremen, Germany, European Society of Precision Engineering, pp. 330–333.
Kaji, S., Goto, T., Sumomogi, T., and Nakamura, M., 1999, “The Study of Ductile-Brittle Transition on Micro-Cutting of Single Crystal Silicon,” Proc. Annual Meeting of the ASPE, Vol. 20, pp. 107–110.
Arefin, S., Liu, K., Li, X. P., and Rahman, M., 2004, “Cutting Conditions and Tool Edge Radius for Nanoscale Ductile Cutting of Silicon Wafer,” Proc. of 2004 Japan-USA Symposium on Flexible Automation, CD, Paper No. UL_031.
Albrecht,  P., 1960, “New Developments in Theory of Metal-Cutting Process—1. Ploughing Process in Metal Cutting,” ASME J. Eng. Ind., 82, pp. 348–358.
Manjunathaiah,  J., and Endres,  W. J., 2000, “A New Model and Analysis of Orthogonal Machining With an Edge-Radiused Tool,” ASME J. Manuf. Sci. Eng., 122, pp. 384–390.
Waldorf,  D. J., DeVor,  R. E., and Kapoor,  S. G., 1998, “Slip-Line Field for Ploughing During Orthogonal Cutting,” ASME J. Manuf. Sci. Eng., 120, pp. 693–698.
Zhang,  H. T., Liu,  P. D., and Hu,  R. S., 1991, “A Three-Cap Model and Solution of Shear Angle in Orthogonal Machining,” Wear, 143, pp. 29–43.
Waldorf,  D. J., DeVor,  R. E., and Kapoor,  S. G., 1999, “An Evaluation of Ploughing Models for Orthogonal Machining,” ASME J. Manuf. Sci. Eng., 121, pp. 550–558.
Kountanya, R. K., and Endres, W. J., 2001, “A High-Magnification Experimental Study of Orthogonal Cutting With Edge-Honed Tools,” ASME Proceedings of the ASME Manufacturing Engineering Division (MED-Vol. 12), 2001 ASME International Mechanical Engineering Congress and Exposition, N.Y., pp. 157–164.
Taniyama,  H., Eda,  H., Zhou,  L., Shimizu,  J., and Sato,  J., 2003, “Experimental Investigation of Micro Scratching on the Two-Phase Steel: Plastic Flow Mechanisms of the Ferrite and Cementite Phases,” Key Eng. Mater., 238-239, pp. 15–18.
Jardret,  V., Zahouani,  H., Loubet,  J. L., and Mathia,  T. G., 1998, “Understanding and Quantification of Elastic and Plastic Deformation During a Scratch Test,” Wear, 218, pp. 8–14.
Moriwaki,  T., Sugimura,  N., Manabe,  K., and Iwata,  K., 1991, “A Study on Orthogonal Micromachining of Single Crystal Copper,” Transaction of the NAMRI/SME, 19, pp. 177–183.
Ueda,  K., and Iwata,  K., 1980, “Chip Formation Mechanism in Single Crystal Cuting of Beta-Brass,” CIRP Ann., 29, pp. 65–68.
To,  S., Lee,  W. B., and Chan,  C. Y., 1997, “Ultraprecision Diamond Turning of Aluminum Single Crystals,” J. Mater. Process. Technol., 63, pp. 157–162.
Lee,  W. B., To,  S., and Cheung,  C. F., 2000, “Effect of Crystallographic Orientation in Diamond Turning of Copper Single Crystals,” Scr. Mater., 42, pp. 937–945.
Patten, J., Mundy, P., Fang, N., and Domblesky, J., 2004, “Advanced Machining of Alternative Materials—Part A: Cutting Mechanics,” [SME International Manufacturing Technology Summit], Dearborn, MI, Proc. of 1st Annual Manufacturing Technology Summit Conference, 2004, Dearborn, MI, pp. 1–11.
Belak, J. and Stowers, I. F., 1990, “A Molecular Dynamics Model of the Orthogonal Cutting Process,” Proc. of ASPE Annual Conference, Oct. 13–18, 1991, pp. 100–104.
Belak, J., Lucca, D. A., Komanduri, R., Rhoerer, R. L., Moriwaki, K., Okuda, S., Ikawa, N., Shimada, S., Tanaka, H., Dow, T. A., Drescher, J. D., and Stowers, I. F., 1991, “Molecular Dynamics Simulation of the Chip Formation Process in Single Crystal Copper and Comparison With Experimental Data,” Proc. ASPE Annual Conference, Oct. 13–18, pp. 100–109.
Ikawa,  N., Shimada,  S., and Tanaka,  H., 1992, “Minimum Thickness of Cut in Micromachining,” Nanotechnology, 3, pp. 6–9.
Komanduri,  R., Chandrasekaran,  N., and Raff,  L. M., 1998, “Effect of Tool Geometry in Nanometric Cutting: A Molecular Dynamics Simulation Approach,” Wear, 219, pp. 84–97.
Komanduri,  R., Chandrasekaran,  N., and Raff,  L. M., 1999, “Orientation Effects in Nanometric Cutting of Single Crystal Materials: An MD Simulation Approach,” CIRP Ann., 48, pp. 67–72.
Komanduri,  R., Chandrasekaran,  N., and Raff,  L. M., 2000, “M.D. Simulation of Nanometric Cutting of Single Crystal Aluminum-Effect of Crystal Orientation and Direction of Cutting,” Wear, 242, pp. 60–88.
Liu, X., Vogler, M. P., Kapoor, S. G., DeVor, R. E., Ehmann, K. F., Mayor, R., Kim Changju, and Ni, J., 2004, “Micro-Endmilling With Meso-Machine-Tool System,” NSF Design, Service and Manufacturing Grantees and Research Conference Proc., Dallas, TX.
Moriwaki,  T., Sugimura,  N., and Luan,  S., 1993, “Combined Stress, Material Flow and Heat Analysis of Orthogonal Micromachining of Copper,” CIRP Ann., 42, pp. 75–78.
Dinesh, D., Swaminathan, S., Chandrasekar, S., and Farris, T. N., 2001, “An Intrinsic Size-Effect in Machining Due to the Strain Gradient,” Proc. ASME Manufacturing Engineering Division (MED-vol. 12 ), ASME International Mechanical Engineering Congress and Exposition, NY, pp. 197–204.
Liu, K., and Melkote, S. N., 2004, “A Strain Gradient Based Finite Element Model for Micro/Meso-Scale Orthogonal Cutting Process,” Proc. of 2004 Japan-USA Symposium on Flexible Automation, Denver, CO, Paper No. UL_048.
Kopalinsky, E. M., and Oxley, P. L. B., 1984, Size Effect in Metal Removal Processes, Inst of Physics, Bristol, pp. 389–396.
Chuzhoy, L., DeVor, R. E., Kapoor, S. G., and Bammann, D. J., 2001, “Microstructure-Level Modeling of Ductile Iron Machining,” Proc. ASME Manufacturing Engineering Division (MED-Vol. 12 ), 2001 ASME International Mechanical Engineering Congress and Exposition, NY, pp. 125–134.
Inamura,  T., Takezawa,  N., Kumai,  Y., and Sata,  T., 1994, “On a Possible Mechanism of Shear Deformation in Nanoscale Cutting,” CIRP Ann., 43, pp. 47–50.
Abraham,  F. F., Broughton,  J. Q., Bernstein,  N., and Kaxiras,  E., 1998, “Spanning the Length Scales in Dynamic Simulation,” Comput. Phys., 12, pp. 538–546.
Broughton,  J. Q., Abraham,  F. F., Bernstein,  N., and Kaxiras,  E., 1999, “Concurrent Coupling of Length Scales: Methodology and Application,” Phys. Rev. B, 60, pp. 2391–2403.
Lidorikis, E., Bachlechner, M. E., Kalia, R. K., Voyiadjis, G. Z., Nakano, A., and Vashishta, P., 2001, Coupling of Length Scales: Hybrid Molecular Dynamics and Finite Element Approach for Multiscale Nanodevice Simulations, Materials Research Society, Boston, pp. 9–3.
Zhigilei, L. V., 2001, Computational Model for Multiscale Simulation of Laser Ablation, Materials Research Society, San Francisco, pp. 2–1.
Kim,  J. D., and Kim,  D. S., 1995, “Theoretical Analysis of Micro-Cutting Characteristics in Ultra-Precision Machining,” J. Mater. Process. Technol., 49, pp. 387–398.
Vogler,  M. P., DeVor,  R. E., and Kapoor,  S. G., 2004, “On the Modeling and Analysis of Machining Performance in Micro-Endmilling, Part II: Cutting Force Prediction,” ASME J. Manuf. Sci. Eng., Proc. ASME Manufacturing Engineering Division (MED-vol. 15), ASME International Mechanical Engineering Congress and Exposition, Anaheim, CA. Paper No. IMECE 2004-62416.
Joshi, S., and Melkote, S., 2002, “An Explanation for the Size-Effect in Machining Using Strain Gradient Plasticity,” JSME/ASME Int. Conf. On Materials and Processing, pp. 318–323.
Liu, X., Jun, M. B. G., DeVor, R. E., and Kapoor, S. G., 2004, “Cutting Mechanisms and Their Influence on Dynamic Forces, Vibrations and Stability in Micro-Endmilling,” Proc. ASME Manufacturing Engineering Division (MED-15 ), ASME International Mechanical Engineering Congress and Exposition, Anaheim CA. Paper No. IMECE2004–62416.

Figures

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(a) Micromilled trenches with stepped walls 8, (b) neurovascular device component, and (c) microgear
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Direction of resultant force vector for new and worn tools with the same overall tool geometry 20
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Effect of tool edge condition on thrust force in orthogonal flycutting of Al 6061-T6 21
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Chips generated at an uncut chip thickness of 1 nm 23
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Theoretical surface profile considering the minimum chip thickness effect 17
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Experimental Y force (normal to the feed force) and the corresponding power spectrum 14
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Effect of tool edge radius on surface roughness for pearlite 25
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Burr formation in micromilling: (a) flag-type burr on tool exit and (b) rollover-type burr on tool entrance 27
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SEM photographs of machined silicon wafer surfaces for different maximum undeformed chip thickness (dmax) and tool edge radius values 37
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Cross section profile of scratch groove 44
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The effects of the crystallographic orientation and the depth of cut on the surface roughness 48
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Experimental cutting forces in micromilling of pearlitic ductile iron 18
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SEM image of (a) ferrite slot floor, (b) ferritic ductile iron slot floor, (c) fearltie chips, and (d) ferritic ductile iron chips 25
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Schematic of the model used in the MD simulation of nanometric cutting of single-crystal aluminum 56
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Three modes of dislocation motion 56
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Material flow near a rounded cutting edge 57
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Effective stress contours 60
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Variation of specific cutting energy with undeformed chip thickness 60
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Endmilling of ductile iron workpiece 18
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Effect of minimum chip thickness on surface roughness 25
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Tool vibration histories and frequency spectra for machining pearlite at different feed rate 71
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Chipload/force relationship for pearlite 71

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