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TECHNICAL PAPERS

Mechanistic Understanding of Material Detachment During Micro-Scale Polishing

[+] Author and Article Information
W. Che, Y. Guo, A. Chandra

Dept. of Mechanical Engineering, Iowa State University, Ames, IA 50011

A-F. Bastawros

Dept. of Aerospace Engineering and Engineering Mechanics, Iowa State University, Ames, IA 50011e-mail: bastaw@iastate.edu

J. Manuf. Sci. Eng 125(4), 731-735 (Nov 11, 2003) (5 pages) doi:10.1115/1.1619964 History: Received October 01, 2002; Revised June 01, 2003; Online November 11, 2003
Copyright © 2003 by ASME
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References

Preston,  F. W., 1927, “The Theory and Design of Plate Glass Polishing Machine,” J. Soc. Glass Tech., 11(44), pp. 214–256.
Luo,  J., and Dornfeld,  D. A., 2001, “Material Removal Mechanism in Chemical Mechanical Polishing: Theory and Modeling,” IEEE Trans. Semicond. Manuf., 14(2), pp. 112–133.
Fu,  G., Chandra,  A., Guha,  S., and Subhash,  G., 2001, “A Plasticity Based Model of Material Removal in Chemical Mechanical Polishing (CMP),” IEEE Trans. Semicond. Manuf., 14(4), pp. 406–417.
Bastawros,  A.-F., Chandra,  A., Guo,  Y., and Yan,  B., 2002, “Pad Effects on Material Removal Rate in Chemical Mechanical Planarization,” Journal of Electronic Mater. 31(10), pp. 1022–1031.
Shaw, M. C., 1984, Metal Cutting Principles, Clarendon Press, Oxford.
Kuehn, J., 2000, “Particle Scale and Wafer Scale Effects in Chemical and Mechanical Planarization (CMP),” MS Thesis, Dept of Mechanical Engineering and Engineering Mechanics, Michigan Technological University.
Xie,  Y., and Williams,  J. A., 1993, “The Generation of Worn Surfaces by the Repeated Interaction of Parallel Grooves,” Wear, 162–164, pp. 864–872.
Lange, K., and Kurz, N., 1984, “Theoretical and Experimental Investigation of the “Groz” Cold Shape-Rolling Process,” Inst. for Metal Forming Report, University of Stuttgart, Germany.
Chandra,  A., 1989, “Profile Rolling of Gears: A Boundary Element Analysis,” ASME J. Eng. Ind., 111, pp. 48–55.
ABAQUS User Manuals, Ver. 6.1, 2001, Hibbitt Karlsson and Sorensen Inc., Providence, RI.
Komanduri,  R., Chandrasekaran,  N., and Raff,  L. M., 1998, “Effect of Tool Geometry in Nanometric Cutting: A Molecular Dynamics Simulation Approach,” Wear, 219, pp. 84–97.

Figures

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Experimental setup showing the rotational motion of the indenter relative to the specimen surface and the supporting two load cells with high control motion
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SEM image showing: (a) the intersecting scratches and (b) the details of the ploughing and shearing zones
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(a) Normal and tangential forces for the secondary scratch. (b) Details of the tangential force close to the intersection zone,“2” showing different force decay rates.
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Characteristic length variation with the scratch depth
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(a) FEM abrasive particle-surface interaction model. (b) Normal and tangential reaction forces on the abrasive particle, showing the start of force decay at a characteristic distance from the primary scratch.
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Schematic of scratch intersection

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