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TECHNICAL PAPERS

Recent Advances in the Study of Electrochemical Micromachining

[+] Author and Article Information
M. Datta, R. V. Shenoy, L. T. Romankiw

IBM Corporation, T. J. Watson Research Center, Yorktown Heights, NY 10598

J. Eng. Ind 118(1), 29-36 (Feb 01, 1996) (8 pages) doi:10.1115/1.2803644 History: Received May 01, 1994; Revised September 01, 1994; Online January 17, 2008

Abstract

The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented.

Copyright © 1996 by The American Society of Mechanical Engineers
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