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TECHNICAL PAPERS

Development of a Microscopic Laser Interferometry System for Precision Surface Measurement

[+] Author and Article Information
E. J. Salisbury

Department of Industrial and Manufacturing Systems Engineering, Iowa State University, Ames, IA

K. S. Moon, J. W. Sutherland

Department of Mechanical Engineering and Engineering Mechanics, Michigan Technological University, Houghton, MI

J. Eng. Ind 117(4), 619-624 (Nov 01, 1995) (6 pages) doi:10.1115/1.2803541 History: Received June 01, 1993; Revised September 01, 1994; Online January 17, 2008

Abstract

A new technique for the evaluation of precision surfaces using laser interferometry is presented. Laser interferometry creates a fringe pattern which contains information about the surface texture of the specimen. The technique presented compares the ideal fringe pattern to the actual fringe pattern to determine the height deviation on the specimen. In this paper, a simulation model is used to predict the fringe pattern for a given surface. The surface topography of a groove on a computer hard disk is then reconstructed from an experimentally obtained fringe pattern. The reconstruction process is verified by comparing the reconstructed surface to a photograph of the actual surface.

Copyright © 1995 by The American Society of Mechanical Engineers
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