Shaping Silicon Nitride With a Carbon Dioxide Laser by Overlapping Multiple Grooves

[+] Author and Article Information
R. J. Wallace

Lawrence Livermore National Laboratory, P.O. Box 808, Mail Code L-482, Livermore, CA 94550

S. M. Copley

Materials Science and Mechanical Engineering Departments, University of Southern California, Los Angeles, CA 90089-0241

J. Eng. Ind 111(4), 315-321 (Nov 01, 1989) (7 pages) doi:10.1115/1.3188766 History: Received July 01, 1988; Revised February 27, 1989; Online July 30, 2009


In this research, the feasibility of shaping Si3 N4 by overlapping multiple grooves produced with a continuously operated CO2 laser beam is demonstrated. The relationships of process parameters such as material removal rate and arithmetic average surface roughness to machine parameters such as feed and speed have been investigated. Strategies for laser shaping are discussed and an economic evaluation of laser shaping is presented.

Copyright © 1989 by ASME
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