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RESEARCH PAPERS

Super Microscopic Displacement and Angle Adjusting Instrument

[+] Author and Article Information
N. Tsuda

Engineering Metrology Section, National Research Laboratory of Metrology, Tokyo, Japan

K. Nakano

The Tokyo Metropolitan Industrial Technique Institute, Tokyo, Japan

M. Sawabe

National Research Laboratory of Metrology, Tokyo, Japan

J. Eng. Ind 102(3), 195-200 (Aug 01, 1980) (6 pages) doi:10.1115/1.3183854 History: Received August 09, 1979; Online July 30, 2009

Abstract

A newly developed apparatus that can afford fine displacement and angle is reported here. The characteristics of this is to make use of elastic deformation and to be manufactured as firmly as possible in a solid structure. The experimental results show that adjusting rectilinear displacement can be set within 0.01 μm, and this apparatus can perform paralleled movement of 4 μm displacement within 0.01 seconds of arc, moreover can set the given angles, for example 1.0, 0.5 and 0.2 seconds of arc correctly and easily.

Copyright © 1980 by ASME
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