Effect of Datum Securing Method on Precision of Mechanical Alignment System

[+] Author and Article Information
Neville K. S. Lee, Keith K. C. Hon, Venus P. Y. Cheung, Ajay Joneja

Dept. of IEEM, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong

J. Manuf. Sci. Eng 122(2), 350-359 (Jul 01, 1999) (10 pages) doi:10.1115/1.538925 History: Received September 01, 1998; Revised July 01, 1999
Copyright © 2000 by ASME
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Van Zant, P., 1990, Microchip Fabrication—A Practical Guide to Semiconductor Processing, 2nd ed., McGraw-Hill, New York, Chap. 8.
Mickan,  U., and Rinn,  K., 1993, “Absolute Pattern Placement Metrology On Wafers,” SPIE, 1926, pp. 412–419.
Zaid,  S. H., Frauenglass,  A., and Brueck,  S. R. J., 1994, “Moiré Interferometric Alignment and Overlay Techniques,” SPIE, 2196, pp. 371–382.
O’Mara, W. C., 1993, Liquid Crystal Flat Panel Display, Van Nostrand Reinhold, New York, Chap. 2.
Jorgensen, F., 1988, The Complete Handbook of Magnetic Recording, Tab Books, Blue Ridge Summit, PA.
Lee, N. K. S., Jain, A., and Keppeler, E., “Apparatus and Method for Fabrication of a Lens/Mirror Tower,” U.S. Patent 5,260,928.
Siegman, A. E., 1986, Lasers, University Science Books, Mill Valley, CA.
Lee,  N., and Joneja,  A., 1997, “A Method to Improve Manufacturing Precision in the Presence of Workpiece Imperfections,” ASME J. Manuf. Sci. Eng., 119, pp. 616–622.
Lee,  N., Cai,  Y., and Joneja,  A., 1997, “A High Resolution Multi-dimensional Displacement Monitoring System,” J. Opt. Eng., 36, pp. 2287.
Lou,  D. Y., Martinez,  A., and Stanton,  D., 1984, “Surface Profile Measurement with a Dual-Beam Optical System,” Appl. Opt., 23, No. 5, pp. 746–751.
Kazovsky,  L. G., 1983, “Theory of Tracking Accuracy of Laser Systems,” Opt. Eng., 22, No. 3, pp. 339–347.
Ackerson,  D. S., and Harry,  D. R., 1985, “Theory, Experimental Results, and Recommended Standards Regarding the Static Positioning and Orientation Precision of Industrial Robots,” Rob. Comput.-Interger. Manuf., 2, No. 3–4, pp. 247–259.
Lau,  W. S., and Ng,  K. L., 1992, “Experimental and Statistical Determination of the Static Position Repeatability and a Recommended Specification for a SCARA Robot,” Robotics Comput.-Integ. Manuf., 9, No. 3, pp. 247–253.
Slocum, A. H., Precision Machine Design, Prentice Hall, Englewood Cliffs, NJ, Sec. 7.7, pp. 401–412.
Our particular implementation may not be optimized. We are indebted to one of our reviewers, who has provided us with references on kinematic clamp and has pointed out this fact about our implementation.


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Multidimensional optical position monitoring system
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Design of new removable datum utilizing kinematic clamp
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Prototype of removable datum mechanical alignment system
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(a) Profile of aluminum sample prepared by milling process. (b) Profile of aluminum sample prepared by shearing process.
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(a) Waviness measurement of rough Al by CMM. (b) Waviness measurement of smooth Al by CMM



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